Fabrication of&amp;lt;tex&amp;gt;$hboxSiO_2$&amp;lt;/tex&amp;gt;Microlenses on Silicone Rubber Using a Vacuum-Ultraviolet&amp;lt;tex&amp;gt;$hboxF_2$&amp;lt;/tex&amp;gt;Laser

2019

Nanomaterials

A 193-nm ArF excimer laser was used to induce the photodissociation of Si–O bonds of silicone rubber in order to fabricate a periodic micro/nano-suction cup silicone structure, approximately 1 μm in diameter and 2 μm in height at regular intervals of 2.5 μm. The laser was focused on Al-coated silicone rubber by each silica glass microsphere 2.5 μm in diameter, which covered the entire surface of the silicone rubber. The silicone rubber underneath each microsphere photochemically swelled after laser-ablating the coated Al to limit the diameter of the swelling. Simultaneously, the coated Al was able to adjust the focal point to the surface of the silicone rubber to form a hole approximately 500 nm in diameter, centered at the swollen silicone. The dependences of the thickness of the coated-Al and the laser pulse number are discussed, based on the observations of a scanning electron microscope (SEM) and an atomic force microscope (AFM). The superhydrophobic property of the fabricated micro/nano-suction cup structure was successfully found.

Section: Introductionmentioning

confidence: 99%

Fabrication of Superhydrophobic Silicone Rubber with Periodic Micro/Nano-Suction Cup Structure by ArF Excimer Laser-Induced Photodissociation

2019

Nanomaterials

“…The F 2 laser also enables a unique photochemical surface modification of a polydimethylsiloxane (silicone) rubber into a pure silica glass (SiO 2 ) [2,7,8]. Based on the modification, a SiO 2 optical waveguide or SiO 2 microlens array has been successfully fabricated on a flexible substrate of silicone rubber [9][10][11][12]. Also, this modification has been applied to surface hardening of silicone for developing a lightweight automobile window [13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Micro/nano-suction cup structure of silicone rubber fabricated by ArF excimer laser

2019

SN Appl. Sci.

Micro/nano-suction cups of silicone rubber, cylindrical swelling structures in micron size with a hole of hundreds nanometer diameter each, were fabricated by 193-nm ArF excimer laser-induced photodissociation of silicone rubber. To be periodically, silica glass microspheres of 2.5 μm diameter were aligned on silicone rubber via Al thin film during laser irradiation. The Al thin film underneath each microsphere was locally laser-ablated to enable a circular irradiation of subsequent laser pulses, then the exposed silicone rubber was photochemically swelled by the photodissociation of Si-O bonds of silicone rubber. Also, debris of aluminum surrounding the laser-ablated areas resulted in pushing microsphere up to adjust a focal point to the surface of silicone rubber to form a hole centered at each the swelled silicone. The fabricated structure showed clear superhydrophobic properties. Dependence of single pulse fluence of ArF excimer laser on the fabrication of micro/nano-suction cup structure was discussed, together with the variation of thickness of Al thin film from 10 to 100 nm. The use of the superhydrophobic silicone rubber we fabricated is expected as a kind of delivery system, toward holding a small object even in water by each micro/nano-suction cup structure.

“…[6][7][8] Based on that result, we conducted fundamental research to fabricate flexible optical devices through directly forming SiO 2 optical waveguides and microlenses on silicone rubber. [9][10][11][12] In addition, we applied such photochemical surface modification to silicone-coated polycarbonate to demonstrate a possibility of developing next-generation plastic windows for electric vehicles. [13][14][15][16][17][18] It was also found that with such photochemical surface modification, laser-irradiated portions swell when being changed into SiO 2 in the course of depolymerization due to photodissociation of main chain structure (Si-O bonds) of silicone rubber.…”

Section: Introductionmentioning

confidence: 99%

Formation of textured Al thin film on periodic microswelling structure fabricated on silicone rubber surface to realize superhydrophobicity

2019

Elect Comm in Japan

Periodic microswelling structure was fabricated on silicone rubber by the 193‐nm ArF excimer laser induced photodissociation of silicone; subsequent deposition of Al thin film on the sample surface significantly improved the superhydrophobicity. To discuss the improvement, Al thin film was deposited on a flat slide glass, silicone rubber, and silicone resin substrates. Under a scanning electron microscope, textured structure of Al thin film was found only on the silicone rubber. As a result, contact angle of water on the sample with the textured Al indicated to be approximately 165°, compared with the case of 155° before Al deposition.