Fabrication of a Valveless Micropump with Polyimide Membrane

Liu, Yingwei; Matsuno, Shingo; Komatsuzaki, Hiroki; Imai, Satomitsu; Nishioka, Yasushiro

doi:10.1541/ieejsmas.130.378

Cited by 9 publications

(14 citation statements)

References 5 publications

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“…The flow rates of some similar micropumps are compared in micropump is slightly lower than the flow rate the micropump reported by Liu et al 17) and others. However, considering the fact that the chamber volume is more than two orders of magnitude smaller than that used by Liu et al, 17) it should be noted that the micropump investigated here still keeps a high fluid flow rate. This miniaturized micropump has a high performance in low-frequency actuation.…”

Section: Flow Rate Measurementscontrasting

confidence: 53%

“…The micropump chip was fabricated on a 60-m-thick silicon wafer. The thickness of PI membrane was 2.1 m, the diameter of the chamber was 2 mm, and the depth of the micropump chamber was 60 m. Since the micropump reported by Liu et al 17) had dimensions of a PI membrane thickness of 5.4 m, a micropump chamber depth of 525 m, and a diameter of 7 mm, the chamber volume of the micropump they investigated was 20.2 mm 3 . In contrast, the chamber volume of the micropump investigated here was only 0.19 mm 3 , which was only 0.93% of the chamber volume reported by Liu et al 17) Here, it should also be noted that the volume of the micropump chamber is the smallest ever reported to the best of our knowledge.…”

Section: Design and Structure Of Micropumpmentioning

confidence: 99%

“…We have recently reported a diffuser/nozzle micropump with 5.4-m-thick PI membrane that was fabricated by photolithography processes. 17) The micropump has a diaphragm diameter of 7 mm and a chamber depth of 525 m. The water flow rate of the micropump was 310 l/min at an applied air pressure of 10 kPa and 3 Hz. Since the photolithography processes are advantageous in fabricating miniaturized devices, and the diffuser/nozzle micropump has simple geometrical structure, the diffuser/nozzle micropumps with thin PI membranes fabricated using photolithography processes have high performances, and the micropumps could be more easily miniaturized.…”

Section: Introductionmentioning

confidence: 99%

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Diffuser Micropump Structured with Extremely Flexible Diaphragm of 2-µm-thick Polyimide Film

Liu

Komatsuzaki

Duan

et al. 2011

Jpn. J. Appl. Phys.

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A miniaturized diffuser/nozzle micropump with extremely thin (only 2.1 µm in thickness) polyimide (PI) membranes was fabricated on a 60-µm-thick Si wafer using simple photolithography processes. The diameter of the diaphragm was 2 mm, and the chamber depth was 60 µm. The micropump was functioned by deforming the membranes with alternating air pressure. The ethanol flow rate of the micropump was over 400 nl/min at 2.5 Hz with an actuated pressure of 5 kPa. The measured flow rate was relatively higher than those of previously reported micropumps with a similar chamber volume owing to the large deflection (over 40 µm) of the PI membrane. The micropump processing issues of plasma induced damage to the PI membrane during Si chamber etching and the behaviors of the static and dynamic deflections of the PI membrane was also discussed. On the basis of the advantages of photolithography processes and the good performance of the micropump, it is expected that the micropump can be fabricated on silicon integrated circuit chips.

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Section: Flow Rate Measurementscontrasting

confidence: 53%

Section: Design and Structure Of Micropumpmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Diffuser Micropump Structured with Extremely Flexible Diaphragm of 2-µm-thick Polyimide Film

Liu

Komatsuzaki

Duan

et al. 2011

Jpn. J. Appl. Phys.

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“…Molds with two kinds of photomask patterns were designed for the actuators with a resistive heater to replace the air actuator used in the previously reported micropumps [8,9], as shown in Fig. 4.…”

Section: Mold Designmentioning

confidence: 99%

Transfer Printing of Au Micropatterns on Polyimide Films

Komori

Kosuge

Kuroda

et al. 2013

J. Photopol. Sci. Technol.

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The transfer printing of Au micropatterns onto a polyimide (PI) film was investigated, and the optimum transfer conditions were obtained. In this study, micropatterns with widths of 25 μm and 75 μm were successfully transferred onto a PI film at a molding temperature of 150 °C for 5 s under a molding pressure of 2.5 MPa. This technique is expected to provide simplified processes in fabricating wiring patterns in microelectromechanical systems.

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“…7,8) In addition, extremely thin and very flexible PI films as a diaphragm can be deposited using spin-coating techniques, which is compatible with microfabrication processes. Liu et al 9) have recently fabricated a diffuser/nozzle micropump with a 5.4-m-thick PI membrane using photolithography, dry etching of silicon, and PI spin coating. The micropump had a diaphragm diameter of 7 mm and a chamber depth of 525 m. The water flow rate of the micropump was 310 l/min for alternating air pressures between 0 and 10 kPa at a frequency of 3 Hz.…”

Section: Introductionmentioning

confidence: 99%

Flexible Polyimide Micropump Fabricated Using Hot Embossing

Komatsuzaki¹,

Suzuki²,

Liu³

et al. 2011

Jpn. J. Appl. Phys.

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Micropumps are important components of advanced microfluidic systems. Here, polyimide (PI) as an advantageous structural material for flexible micropumps was focused on. This is because PI has many advantageous properties such as high thermal stability and superior mechanical strength. However, the difficulty in realizing an all-PI micropump lies in fabricating microstructures on PI film surfaces. In this paper, we present a novel all-PI micropump fabricated using hot embossing. The micropump had diffuser/nozzle valves and functioned by vibrating a 2-µm-thick PI diaphragm with alternating air pressures between 0 and 10 kPa at a frequency of 3 Hz. The height and diameter of the PI micropump chamber were 200 µm and 5 mm, respectively. The flow rate of water in the micropump was 34 µl/min. This micropump is suitable for flexible microfluidic systems.

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Fabrication of a Valveless Micropump with Polyimide Membrane

Cited by 9 publications

References 5 publications

Diffuser Micropump Structured with Extremely Flexible Diaphragm of 2-µm-thick Polyimide Film

Diffuser Micropump Structured with Extremely Flexible Diaphragm of 2-µm-thick Polyimide Film

Transfer Printing of Au Micropatterns on Polyimide Films

Flexible Polyimide Micropump Fabricated Using Hot Embossing

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