Fabrication of a plasmonic modulator incorporating an overlaid grating coupler

Hassan, Sa ad; Lisicka-Skrzek, Ewa; Olivieri, Anthony; Tait, R. Niall; Berini, Pierre

doi:10.1088/0957-4484/25/49/495202

Cited by 13 publications

(9 citation statements)

References 16 publications

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“…Gold nanogratings on Si have been shown to successfully couple incoming optical light to SPPs excited at the nanograting-Si interface. 58 A metal-semiconductor (Schottky) nanograting structure has been proposed as an SPP photodetector, 59,60 sensitive to the angle of incidence, polarization, and wavelength of light. The SPP photodetector consists of a Au/Si Schottky diode with a grating also used as the metal contact, and the detector converts SPP signals into photocurrent.…”

Section: Grating Detectorsmentioning

confidence: 99%

Surface plasmon enhanced photodetectors based on internal photoemission

2016

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Surface plasmon photodetectors are of broad interest. They are promising for several applications including telecommunications, photovoltaic solar cells, photocatalysis, color-sensitive detection, and sensing, as they can provide highly enhanced fields and strong confinement (to subwavelength scales). Such photodetectors typically combine a nanometallic structure that supports surface plasmons with a photodetection structure based on internal photoemission or electron-hole pair creation. Photodetector architectures are highly varied, including waveguides, gratings, nanoparticles, nanoislands, or nanoantennas. We review the operating principles behind surface plasmon photodetectors based on the internal photoelectric effect, and we survey and compare the most recent and leading edge concepts reported in the literature. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Section: Grating Detectorsmentioning

confidence: 99%

Surface plasmon enhanced photodetectors based on internal photoemission

2016

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“…These features are very attractive for application to optoelectronic devices such as in photodetectors [6][7][8][9][10][11][12][13][14] and modulators [15][16][17][18] because the involvement of SPPs alters conventional trade-offs between responsivity and speed, or modulation and speed, respectively. Fundamentally, sub-wavelength confinement enables the active region to be shrunk to nano-scale dimensions, while the SPP field enhancement can maintain good optoelectronic performance.…”

Section: Introductionmentioning

confidence: 99%

“…Here we discuss progress on surface plasmon enhanced photodetectors and modulators, particularly, recent proposals for a photodetectors exhibiting THz electrical bandwidths [8,9], demonstrations of sub-bandgap photodetectors on Si [12][13][14], and high-speed reflection modulators on Si based on the carrier refraction effect [16,17].…”

Section: Introductionmentioning

confidence: 99%

Surface plasmon optoelectronics and exceptional point waveguides on silicon

Berini

2019

Integrated Optics: Design, Devices, Systems, and Applications V

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We discuss recent progress on plasmonic and metasurface optoelectronic devices on silicon. Emphasis is placed on devices for sub-bandgap hot-carrier photodetection and high-speed intensity modulation. Surface-normal structures are of particular interest. We also discuss recent work on exceptional point waveguides, wherein the modal evolution traces out adiabatic and anti-adiabatic parametric paths around an exceptional point, and in combination with a gain saturation nonlinearity, leads to non-reciprocity.

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“…Corrugated grating couplers were used initially to create integrated and compact structures which are of high interest today. Table 1 briefly reviews the structures and characteristics of the devices explained in this paper: Other interesting similar structures can be found in [34], [48], [86], [87], [88] and [89].…”

Section: Discussionmentioning

confidence: 84%

“…where is the wavenumber of the SPP parallel to the metal surface, 0 is the wavenumber of the incident light, is the angle of incidence of the light, is the grating order and Λ is the grating pitch. Gold nanogratings on Si have been shown to successfully couple incoming optical light to SPPs excited at the nanograting-Si interface [86]. A metal-semiconductor (Schottky) nanograting structure has been proposed as an SPP photodetector [87,88], sensitive to the angle of incidence, polarization and wavelength of light.…”

Section: Grating Detectorsmentioning

confidence: 99%

Surface Plasmon-Polariton Schottky Photodetectors

Alavirad¹

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This article thesis presents the full design, fabrication, characterization and testing of two surface plasmon-polaritons (SPPs) photodetectors operating at telecommunication wavelengths.Surface plasmon photodetectors are of great current interest. Such detectors typically combine a metallic structure that supports surface plasmons with a photodetection structure based on internal photoemission or electron-hole pair creation. We present two metal nano-structures supporting SPPs, integrated into a silicon-based Schottky-contact photodetector: an array of nanoantennas and nano-gratings. In both structures, incident photons coupled to the array excite SPPs on the gold (Au) nanowires of the antennas which decay by creating "hot" carriers in the metal. The hot carriers may then be injected over the potential barrier at the Au-Si interface resulting in a photocurrent.A metal grating is used to couple perpendicularly-incident light to SPPs propagating along a thin metal patch forming a Schottky contact to p-Si. The responsivity is enhanced by the absorption of SPPs directly along the Schottky contact leading to the creation of hot holes near the contact. Our measurements reveal a high responsivity of ~13 mA/W at telecom wavelengths (~1550 nm) and under low reverse bias. The responsivity increases with reverse bias. The optical bandwidth (FWHM) is ~80 nm. These detectors have many important advantages such as speed, simplicity, compatibility with silicon, and low-cost fabrication.In the nanoantenna case, high responsivities of 100 mA/W and practical minimum detectable powers of −12 dBm should be achievable near 1550 nm which makes monitoring of the spectral response very easy. The device was then investigated for use as a biosensor by computing its bulk and surface sensitivities. Sensitivities of ∼250 nm/RIU (bulk) and ∼8 nm/nm (surface) in water are predicted. We identify the mode propagating and resonating along the nanowires of the iii antennas, we apply a transmission line model to describe the performance of the antennas, and we extract two useful formulas to predict their bulk and surface sensitivities. As a biosensor, this structure offers significant advantages as it simplifies the interrogation setup: only the photocurrent generated by the device needs to be monitored, and the excitation optics (bottom) is physically separated from the micro-fluidics (top) by the device. We also propose a Schottky contact photodetector based on electrically-contacted Au nanoantennas on p-Si for the plasmonic detection of sub-bandgap photons in the optical communications wavelength range. This highly compact component is very promising for applications in high-density Si photonic integration.iv

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Fabrication of a plasmonic modulator incorporating an overlaid grating coupler

Cited by 13 publications

References 16 publications

Surface plasmon enhanced photodetectors based on internal photoemission

Surface plasmon enhanced photodetectors based on internal photoemission

Surface plasmon optoelectronics and exceptional point waveguides on silicon

Surface Plasmon-Polariton Schottky Photodetectors

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