Fabrication of a novel SEM microgripper by electrochemical and FIB techniques

Briston, K J; Cullis, A. G.; Inkson, Beverley J.

doi:10.1088/0960-1317/20/1/015028

Cited by 11 publications

(4 citation statements)

References 26 publications

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“…Nevertheless nanoscale 'laboratories' have been developed to replicate bulk mechanical testing, but at the nanoscale. Such laboratories have developed a variety of nanotools to undertake measurements including for example: microgrippers, 12 in situ mechanical deformation by nanoindentors 13 and even nanosolder 14 to weld nanomaterials together. Furthermore, the development of nanoscale tomography can now determine the nanostructure morphology and chemistry with three-dimensional spatial resolution.…”

Section: Introductionmentioning

confidence: 99%

Mechanical properties of ceria nanorods and nanochains; the effect of dislocations, grain-boundaries and oriented attachment

et al. 2011

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We predict that the presence of extended defects can reduce the mechanical strength of a ceria nanorod by 70%. Conversely, the pristine material can deform near its theoretical strength limit. Specifically, atomistic models of ceria nanorods have been generated with full microstructure, including: growth direction, morphology, surface roughening (steps, edges, corners), point defects, dislocations and grain-boundaries. The models were then used to calculate the mechanical strength as a function of microstructure. Our simulations reveal that the compressive yield strengths of ceria nanorods, ca. 10 nm in diameter and without extended defects, are 46 and 36 GPa for rods oriented along [211] and [110] respectively, which represents almost 10% of the bulk elastic modulus and are associated with yield strains of about 0.09. Tensile yield strengths were calculated to be about 50% lower with associated yield strains of about 0.06. For both nanorods, plastic deformation was found to proceed via slip in the {001} plane with direction <110>--a primary slip system for crystals with the fluorite structure. Dislocation evolution for the nanorod oriented along [110] was nucleated via a cerium vacancy present at the surface. A nanorod oriented along [321] and comprising twin-grain boundaries with {111} interfacial planes was calculated to have a yield strength of about 10 GPa (compression and tension) with the grain boundary providing the vehicle for plastic deformation, which slipped in the plane of the grain boundary, with an associated <110> slip direction. We also predict, using a combination of atomistic simulation and DFT, that rutile-structured ceria is feasible when the crystal is placed under tension. The mechanical properties of nanochains, comprising individual ceria nanoparticles with oriented attachment and generated using simulated self-assembly, were found to be similar to those of the nanorod with grain-boundary. Images of the atom positions during tension and compression are shown, together with animations, revealing the mechanisms underpinning plastic deformation. For the nanochain, our simulations help further our understanding of how a crystallising ice front can be used to 'sculpt' ceria nanoparticles into nanorods via oriented attachment.

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Section: Introductionmentioning

confidence: 99%

Mechanical properties of ceria nanorods and nanochains; the effect of dislocations, grain-boundaries and oriented attachment

et al. 2011

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“…Fabrication of the end-effectors of the gripper tip is the most critical step in the entire fabrication process of the stage, as the actual gripping action is controlled and achieved by the end-effectors, which touch the objects. We used electrochemical etching and FIB processing to fabricate the end-effectors in a method similar to one proposed earlier (Briston et al, 2010). A single piece of tungsten wire with a diameter of 0.25 mm was etched electrochemically using a 2 M NaOH solution (Cavallini & Biscarini, 2000), leaving an etched region with a diameter of 20–40 μ m, as shown in Figure 2a.…”

Section: Methodsmentioning

confidence: 99%

Design and Application of a Novel In Situ Nano-Manipulation Stage for Transmission Electron Microscopy

et al. 2015

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A novel nano-scale manipulator capable of handling low-dimensional materials with three-dimensional linear motion, gripping action, and push-pull action of the gripper was developed for an in situ experiment in transmission electron microscopy. X-Y-Z positioning and push-pull action were accomplished by a piezotubing system, combined with a specially designed assembly stage that consisted of a lever-action gripping tip backed by a push-pull piezostack. The gripper tip consisted of tungsten wire fabricated by electrochemical etching followed by a focused ion beam process. Performance of the nano-scale manipulator was demonstrated in a grab-and-pick test of a single silver nanowire and in an in situ tensile test of a pearlitic steel sample with a specific orientation.

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“…Micromanipulation and micro-assembly technologies are increasingly important in precision engineerings, such as micro object assembly, optical fiber adjustment, and cell arrangement (Briston et al, 2010; Clévy et al, 2014; Ichikawa et al, 2014). As a vital component of the micromanipulation system, microgrippers are usually used to implement gripping, holding, and releasing operations in several directions (Berry et al, 2006; Zhu et al, 2018).…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of a two-degrees-of-freedom monolithic compliant piezoelectric microgripper

Song

Yang

et al. 2022

Journal of Intelligent Material Systems and Structures

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This paper presents the design, modeling, and testing of a compliant two-degrees-of-freedom microgripper using a single piezoelectric actuator. It can move along the x- and y-directions by combining double-leaf bridge and parallelogram mechanisms. An analytical model is established using the finite-element method. The displacement amplification ratio, natural frequency, and output coupling ratio are analyzed using ANSYS software. An experimental test system is built to verify the open-loop performances. Experimental results show that the displacement amplification ratios in the x- and y-directions are 30.8 and 8.6. The first resonant frequencies in the x- and y-directions are 123.3 and 546.9 Hz. If an input displacement of 10 μm is applied, the operating ranges in the x- and y-directions are 0–616.6 μm and 0–51.0 μm, and the gripping force range is 0–25.8 mN. Experimental results validate the feasibility of the theoretical model and simulation analysis. Also, closed-loop trajectory control is conducted to reduce the hysteresis nonlinearity and achieve a high control accuracy for the new microgripper.

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Fabrication of a novel SEM microgripper by electrochemical and FIB techniques

Cited by 11 publications

References 26 publications

Mechanical properties of ceria nanorods and nanochains; the effect of dislocations, grain-boundaries and oriented attachment

Mechanical properties of ceria nanorods and nanochains; the effect of dislocations, grain-boundaries and oriented attachment

Design and Application of a Novel In Situ Nano-Manipulation Stage for Transmission Electron Microscopy

Design and analysis of a two-degrees-of-freedom monolithic compliant piezoelectric microgripper

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