Fabrication of a novel quartz micromachined gyroscope

Abstract

A novel quartz micromachined gyroscope is proposed in this paper. The novel gyroscope is realized by quartz anisotropic wet etching and 3-dimensional electrodes deposition. In the quartz wet etching process, the quality of Cr/Au mask films affecting the process are studied by experiment. An excellent mask film with 100 Å Cr and 2000 Å Au is achieved by optimization of experimental parameters. Crystal facets after etching seriously affect the following sidewall electrodes deposition process and the structure’s mechanical behaviours. Removal of crystal facets is successfully implemented by increasing etching time based on etching rate ratios between facets and crystal planes. In the electrodes deposition process, an aperture mask evaporation method is employed to prepare electrodes on 3-dimensional surfaces of the gyroscope structure. The alignments among the aperture masks are realized by the ABM™ Mask Aligner System. Based on the processes described above, a z–axis quartz gyroscope is fabricated successfully.

A novel MEMS S-springs vibrating ring gyroscope with atmosphere package

“…[20][21][22] As illustrated in Figure 6, a 4-inch P-type single-crystalline silicon wafer with 300 µm-thick and resistivity less than 0.01 Ω•cm was used for fabricating, and the detailed fabrication process flow consists of seven steps. The first step of the fabrication process is photolithography, a 3 µm-thick photoresist is spun and patterned on the glass wafer for the lift-off metal layer to form electrode leads (Figure 7a), as showed in step (a).…”

Preface: Micro-Nano Technology

“…7 Besides, a novel sacrificial-layer process based on anodic bonding and its application in an accelerometer are introduced. 8 For the Micro Sensors section, there are two investigations on the gyroscope: fabrication of a novel quartz micro machined gyroscope 9 and enhanced sensitivity in a butterfly gyroscope with a hexagonal oblique beam. 10 The studies about other kinds of sensors include: a 16-bit sigma-delta ADC applied in Micro-machined inertial sensor, 11 analyses on the resonant frequency of the silicon Micro-structure of MEMS vector hydrophone in fluid-structure interaction, 12 a research on the characteristics of 2D magnetic field sensor based on magnetic sensitivity diodes, 13 a study of self-calibration MEMS accelerometers, 14 and modification of inkjet printer for polymer sensitive layer preparation on silicon-based gas sensors.…”