Fabrication of a novel micro time-of-flight mass spectrometer

Yoon, Hyeun Joong; Kim, Jung Hoon; Choi, E.S.; Yang, Sang Sik; Jung, Kwang‐Woo

doi:10.1016/s0924-4247(02)00032-8

Cited by 52 publications

(22 citation statements)

References 10 publications

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“…The ion source was made from three substrates (silicon, borosilicate, and oxidized silicon wafers), and DRIE, anisotropic etching, sputtering, and anodic bonding were applied during the microfabrication process. In another approach, an electron source with a hot filament was fabricated by sputtering tungsten onto silicon oxide and patterning a short filament by photolithography and etching (Yoon et al, 2002(Yoon et al, , 2007. The ion source contained also grid and acceleration electrodes, and a repeller from nickel to accelerate and focus ions towards the MS analyzer.…”

Section: Miniaturized Ion Sources For Gaseous Samplesmentioning

confidence: 99%

Microchip technology in mass spectrometry

Sikanen

Franssila

Kauppila

et al. 2009

Mass Spectrom. Rev.

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Microfabrication of analytical devices is currently of growing interest and many microfabricated instruments have also entered the field of mass spectrometry (MS). Various (atmospheric pressure) ion sources as well as mass analyzers have been developed exploiting microfabrication techniques. The most common approach thus far has been the miniaturization of the electrospray ion source and its integration with various separation and sampling units. Other ionization techniques, mainly atmospheric pressure chemical ionization and photoionization, have also been subject to miniaturization, though they have not attracted as much attention. Likewise, all common types of mass analyzers have been realized by microfabrication and, in most cases, successfully applied to MS analysis in conjunction with on-chip ionization. This review summarizes the latest achievements in the field of microfabricated ion sources and mass analyzers. Representative applications are reviewed focusing on the development of fully microfabricated systems where ion sources or analyzers are integrated with microfluidic separation devices or microfabricated pums and detectors, respectively. Also the main microfabrication methods, with their possibilities and constraints, are briefly discussed together with the most commonly used materials.

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Section: Miniaturized Ion Sources For Gaseous Samplesmentioning

confidence: 99%

Microchip technology in mass spectrometry

Sikanen

Franssila

Kauppila

et al. 2009

Mass Spectrom. Rev.

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“…More recently, microfabricated ion traps have been demonstrated in cylindrical [30][31][32][33], toroidal [34] and linear [35][36][37] arrangements. Many other mass filter types have been realised in microfabricated form, including magnetic and crossed field filters [38][39][40][41][42][43], time-of-flight filters [44][45][46][47][48] and ion separators based on travelling electric fields [49,50].…”

Section: Introductionmentioning

confidence: 99%

Microfabricated Quadrupole Mass Spectrometer With a Brubaker Prefilter

Wright¹,

O'Prey²,

Syms

et al. 2010

J. Microelectromech. Syst.

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Microfabricated quadrupole mass spectrometers with Brubaker pre-filters are demonstrated for the first time. Complete filters are assembled from two dies, each carrying two pairs of rods providing the pre-filter and main filter sections. The rods are held in precision silicon mounts that are fabricated using wafer scale deep reactive ion etching and anodic bonding to glass substrates. Improvements to ion transmission are obtained by tuning the bias potential applied to the pre-filter. The effect is explained in terms of a simple analytic theory for ion motion in the pre-filter. Mass filtering with a range of m/z = 0-1200 and a resolution of m/Δm ≈ 150 at 10% of peak height is demonstrated using 2-4 mm long pre-filter electrodes, 30 mm long main electrodes (both of 650 µm diameter) and a RF drive at ≈ 6.5 MHz.

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“…Most common filter types have been fabricated using MEMS techniques. These include crossed-field [60][61][62] and travelling wave [63][64][65] filters, time-of-flight analyzers [66][67][68][69], cylindrical ion traps 75] and linear [76][77][78][79][80] ion traps. However, quadrupole filters have so far offered the best performance, in terms of mass range and mass resolution.…”

Section: Introductionmentioning

confidence: 99%

MEMS-Based Nanospray-Ionization Mass Spectrometer

Wright¹,

Syms

Moseley³

et al. 2010

J. Microelectromech. Syst.

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An electrospray ionisation mass spectrometer (ESI-MS) whose main components are all fabricated using silicon microelectromechanical systems (MEMS) techniques is demonstrated for the first time. The ion source consists of a microengineered alignment bench containing a V-groove mounting for a nanospray capillary, an ion extraction electrode, and a pneumatic nebuliser. The vacuum interface consists of two plates, each carrying a 50 µm diameter capillary, that are selectively etched and bonded together to provide a differentially pumped internal cavity. The quadrupole filter consists of a microfabricated frame that provides mountings for stainless steel rods measuring 650 µm in diameter and 30 mm in length. Two different quadrupoles are compared: a firstgeneration bonded silicon device, and a second-generation silicon-on-glass device with a Brubaker prefilter. Differential pumping of a MEMS component is demonstrated for the first time, atmospheric pressure ionisation and ion transfer into vacuum are characterised, ESI-MS operation is demonstrated and spectra are presented for a variety of compounds. KEYWORDS:Mass spectrometry, Electrospray, Quadrupole filter, MEMS IntroductionOver 25 years have passed since an electrospray ionisation (ESI) source was first coupled to a quadrupole mass spectrometer (MS) by Yamashita and Fenn [1]. Since then, ESI-MS has become a workhorse of analytical chemistry, allowing analytes to be ionised at atmospheric pressure with little fragmentation and passed into a vacuum system for analysis.Conventional ESI sources employ spray tips with an internal diameter (ID) of ≈100 µm[2]. In order to establish a Taylor cone and maintain stable emission of charged droplets, minimum flow rates of 0.5 -5 µL min -1 and voltages of 2.5 -4 kV are used. However, it has been convincingly demonstrated that high sensitivity and stable emission can be achieved at much lower flow rates and voltages using spray tips with IDs of ≈ 5 µm, and silica nanospray capillaries with a range of coatings have become widely available [3][4][5][6][7][8].Unfortunately, while these are inexpensive, operator expertise and costly positioning apparatus are often required for stable and reproducible performance.Electrosprayed ions are passed into a low-pressure chamber via a vacuum interface. The simplest interface is a single orifice or capillary that allows gas and entrained ions to pass directly into the vacuum chamber. Clearly, the orifice must be small enough or the pumps large enough to ensure that the pressure is consistent with mass analysis. However, the susceptibility of very small orifices to clogging and the inconvenience of large pumps led to this approach being abandoned. Modern instruments employ one or more stages of 4 differential pumping. Larger orifices can be tolerated since only a fraction of the flow is transmitted to the vacuum chamber, while the majority of the gas load can be pumped away at higher pressure using more modest pumps.The effective transfer of ions and molecules from atmospheric pressu...

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Fabrication of a novel micro time-of-flight mass spectrometer

Cited by 52 publications

References 10 publications

Microchip technology in mass spectrometry

Microchip technology in mass spectrometry

Microfabricated Quadrupole Mass Spectrometer With a Brubaker Prefilter

MEMS-Based Nanospray-Ionization Mass Spectrometer

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