SUMMARYLow-temperature bonding is an important fabrication technique for advanced microelectronics, microelectromechanical systems (MEMS), and optoelectronic devices. Recently, many low-temperature bonding techniques such as surface activated bonding have been studied in order to create unique device structures for a wide range of photonics applications. This paper focuses on low-temperature bonding techniques and reviews the state-of-the-art applications involving optoelectronic devices. C⃝