Updates in Advanced Lithography 2013
DOI: 10.5772/56417
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Fabrication of 3D Micro- and Nano-Structures by Prism-Assisted UV and Holographic Lithography

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Cited by 9 publications
(15 citation statements)
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“…Microstructures are important for the realization of micro-electro-mechanical-systems, microfluidic devices, photonic crystals, and plasmonic optoelectronic devices, benefitting various biomedical applications such as medical microfluidic filtering devices [1], drug delivery devices [2] and immunochips for bacteria detection [3]. Current technologies for observing these microstructures are based on scanning electron microscope (SEM), confocal microscope and traditional optical microscope.…”
Section: Introductionmentioning
confidence: 99%
“…Microstructures are important for the realization of micro-electro-mechanical-systems, microfluidic devices, photonic crystals, and plasmonic optoelectronic devices, benefitting various biomedical applications such as medical microfluidic filtering devices [1], drug delivery devices [2] and immunochips for bacteria detection [3]. Current technologies for observing these microstructures are based on scanning electron microscope (SEM), confocal microscope and traditional optical microscope.…”
Section: Introductionmentioning
confidence: 99%
“…[65] The refracting prism enables the splitting and recombining of a single incoming laser beam to form a multiple-beam interference pattern, thereby precluding the need for multiple optical components. [66] The prism HL enables the simple and rapid production of 3D defect-free ordered polymer nanostructures. Figure 5a illustrates the expansion of a laser beam using an objective with a spatial filter, a lens collimator, and normal impingement onto a refracting prism.…”
Section: Prism Hlmentioning
confidence: 99%
“…60 In terms of rapid fabrication, multi-foci methodologies based on a hologram patterning technology can significantly reduce the processing time. 61,62 Computer-generated hologram patterns were used to generate multiple laser beams in controlled positions from a single laser source. These multiple beams were used to simultaneously produce multiple microstructures, which suggests it has a great potential to improve the efficiency of multi-photon polymerization.…”
Section: D Structure Fabrication Using Multi-photon Polymerizationmentioning
confidence: 99%