requires a large transistor width and a short transistor channel length in order to excel in the mentioned attributes. [7][8][9][10] From the architectural perspective, in an integrated pixelated device, transistors should also have small footprints so that light-emitting/-sensing devices can occupy larger areas on each pixel. Yet for planar OFETs, the device area increases with the width and decreasing the channel length demands high-resolution patterning. A vertical geometry allows reduced area requirements by employing a submicrometer thick organic film as the transistor channel. [11,12] However, when the channel length of an OFET approaches the 100 nm regime, high electric fields result in large bulk current densities that cannot be modulated efficiently via a gate-field. [13][14][15] This phenomenon is known as the shortchannel effect and it restricts further improvement of vertical OFETs (VOFETs).In this report, a novel VOFET geometry is demonstrated addressing the short-channel effect, in particular by suppressing the undesired bulk current. It is based on a gate electrode consisting of massively parallel highly doped silicon nanopillars (Figure 1). Crucially different from other VOFETs, an insulating layer is deposited on top of the bottom contact in order to force injection of the charge carriers only from the sides of the bottom metal, and current flow within a thin layer close to the gate dielectric, minimizing space-charge limited current through the bulk semiconductor. Thanks to this unique geometry, ON/OFF ratios up to 10 6 can be realized, i.e., at least three orders of magnitude larger than in previously reported short-channel (100 nm) VOFETs. [11,15] In order to fabricate the nanopillars with a high areal density (≈10 6 pillars mm −2 ), optical resist dots (100 nm radius) arranged in a hexagonal lattice (250 nm lattice constant) are created using displacement Talbot lithography (DTL). It allows for fast wafer-scale patterning. [16] This resist dot pattern acts as an etch mask during etching of about 300 nm into the underlying silicon. Since the silicon is highly doped p-type (resistivity of 0.010-0.025 Ω cm), it can be directly used as a massively parallel nanopillar gate electrode for a single device (≈7 × 10 5 pillars per device of total size 0.7 µm 2 ). In our experiments, we use bulk silicon wafers, but silicon-on-insulator wafers can be used in order to electrically separate individual many-pillar devices. A stoichiometric low-pressure chemical-vapor-deposited (LPCVD) 45 nm silicon nitride (Si 3 N 4 ) isolates these A unique vertical organic field-effect transistor structure in which highly doped silicon nanopillars are utilized as a gate electrode is demonstrated. An additional dielectric layer, partly covering the source, suppresses bulk conduction and lowers the OFF current. Using a semiconducting polymer as active channel material, short-channel (100 nm) transistors with ON/OFF current ratios up to 10 6 are realized. The electronic behavior is explained using space-charge and contact-lim...