Extended Abstracts of the 1995 International Conference on Solid State Devices and Materials 1995
DOI: 10.7567/ssdm.1995.pc-4-4
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Fabrication and Transport Properties of Gate-All-Around Silicon Quantum Wire Transistor

Abstract: A novel fabrication method of silicon quantum wire Gate-All-Around Iransistor (GAAT), in which the gate oxide and the gate electrode are wrapped around the ultra fine silicon quantum wire, has been proposed. In order to verify one-dimensional (1D) subbands effects, we have studied quantum transport in Si quantum wire GAAT with a width of 50nm at low temperatures in zero-magnetic field and in fields up to 10T. Electrical population of lD subbands and magnetic depopulation of lD subbands are clearly observed.

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Cited by 3 publications
(2 citation statements)
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“…Transport spectroscopy features have been attributed to structure in the DOS for many years, for example the quasi-1D features observed in narrow MOSFET channels [98,99,100,101] and carbon nanotubes [102,103,104]. The influence of the reservoir DOS was first seen in the pioneering work on discrete energy levels in metal nanoparticles [49].…”
Section: Dos Of the Reservoirsmentioning
confidence: 99%
“…Transport spectroscopy features have been attributed to structure in the DOS for many years, for example the quasi-1D features observed in narrow MOSFET channels [98,99,100,101] and carbon nanotubes [102,103,104]. The influence of the reservoir DOS was first seen in the pioneering work on discrete energy levels in metal nanoparticles [49].…”
Section: Dos Of the Reservoirsmentioning
confidence: 99%
“…INTRODUCTION N ANOSTRUCTURED devices are being extensively investigated for their possible application in CMOS and post-CMOS technologies. The most interesting examples include the fully depleted, ultrathin film silicon-on-insulator (UT-SOI) MOSFETs [1]- [6] and the nanowire transistors, which are promising candidates for the ultimate CMOS downscaling [7]- [11]. The engineering options for the nano-MOSFETs include the choice of the semiconductor and its crystallographic orientation [12]- [15], as well as the biaxial or uniaxial mechanical strain [16]- [19]; all of them deserve an accurate and extensive evaluation by means of device simulations.…”
Section: Validity Of the Parabolic Effective Mass Approximation In Simentioning
confidence: 99%