Fabrication and test of RF MEMS in LTCC technology

Lucibello, Andrea; Marcelli, R.; Paola, Ernesto Di; Nardo, S. Di; Pochesci, Daniele; Croci, R.; Germani, Chiara

doi:10.1007/s00542-017-3419-4

Cited by 3 publications

(1 citation statement)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The use of RF MEMS (radio frequency micro-electro-mechanical system) switches to provide signal routing and frequency tunability of microwave and millimeter wave components and antennas has been studied over the last two decades. Reports on state-of-the-art designs and past literature can be found in [ 1 , 2 , 3 , 4 , 5 , 6 ]. This topic relates to the general need to study and apply reconfigurable components and sub-systems, as outlined in [ 7 ].…”

Section: Introductionmentioning

confidence: 99%

Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology

Giacomozzi

Proietti

Capoccia

et al. 2023

Sensors

Self Cite

View full text Add to dashboard Cite

U-shaped microwave resonators implemented by RF MEMS switches can be considered the result of a novel design approach for obtaining small-footprint tunable resonators, owing to the bent shape of the resonator and the microsystem solution for changing the frequency of resonance. In this paper, we discuss the design approach for potential configurations of U-shaped structures combined with ohmic RF MEMS switches. Owing to their prospective application in RADAR and satellite systems, the devices were assessed for K-Band operation, specifically for 15 GHz, 20 GHz, and 26 GHz. The ON-OFF states determined by an electrostatic actuation of metal beams composing the RF MEMS ohmic switches allow for selecting different path lengths corresponding to different frequencies. In this contribution, initial configurations were designed and manufactured as a proof-of-concept. The advantages and critical aspects of the designs are discussed in detail.

show abstract