Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting

A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators

“…Various MEMS devices have been demonstrated by using piezoelectric PZT film actuators. These piezoelectric PZT MEMS devices include atomic force microscope (AFM) cantilevers [7], [8] and cantilever sensors [9], micromirrors [10], [11], ultrasonic proximity sensors [12], accelerometers [13], RF MEMS switches [14], energy harvesters [15], [16], etc. In the optical MEMS field, features of large mirror size, large deflection angle, and smaller driving voltage are strongly demanded by applications like optical scanning display, 2-D optical switch, and variable optical attenuator (VOA).…”

Piezoelectric MEMS Power Generators for Vibration Energy Harvesting

“…The corresponding energy density is 0.74mWh/cm 2 , which compares favorably to the values of lithium ion batteries. Fang et al [31,32] successfully developed a PZT MEMS power-generating device based on the d31 mode of piezoelectric transducers that uses top and bottom laminated electrodes. The…”

Energy Harvesting Technologies: Thick-Film Piezoelectric Microgenerator

“…With the development of PVDF thin-film technology, microstructures can be fabricated as reported by Arshak et al [19]. The fabrication process involved drying and curing at low temperature of around 170 °C, and was able to produce d 33 of 24 pC/N 1 [20]. An alternative to PVDF is polyimide, a high temperature piezoelectric polymer, which can maintain its piezoelectric properties at temperature up to 150 °C as reported by Atkinson et al [21].…”