2014
DOI: 10.1088/1748-0221/9/04/p04010
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Fabrication and nuclear reactor tests of ultra-thin 3D silicon neutron detectors with a boron carbide converter

Abstract: We describe the design, fabrication process and characterization of a thermal neutron detector based on ultra-thin silicon PIN diodes with 3D electrodes and a 10 B 4 C neutron converter layer. The sensors were fabricated on SOI silicon with an active thickness of 20 µm which allows for a low gamma sensitivity, while the 3D structure of the electrodes results in a lower capacitance that in the equivalent planar sensor. The 2.7 µm 10 B 4 C converter layer was deposited through RF magnetron sputtering on a whole … Show more

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Cited by 9 publications
(8 citation statements)
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“…Monte Carlo simulations with GEANT4 were developed to investigate optimal detection layer thickness by irradiating different geometry possibilities with a thermal neutron beam perpendicular to the detection layer, incident from the side of detector A. The materials considered were 99% enriched 10 B4C, as reported achievable in literature [3], surrounded by Ar:CO2 (90%:10%), a commonly used gas in boron-coated gaseous detectors, at atmospheric pressure. A 0.9 µm Mylar layer was used as substrate, which despite being indispensable to support the B4C, does not contribute to the conversion of neutrons, but rather only to the absorption of the reaction secondary products, and therefore should ideally be as thin as practically feasible.…”
Section: Monte Carlo Simulation Resultsmentioning
confidence: 99%
“…Monte Carlo simulations with GEANT4 were developed to investigate optimal detection layer thickness by irradiating different geometry possibilities with a thermal neutron beam perpendicular to the detection layer, incident from the side of detector A. The materials considered were 99% enriched 10 B4C, as reported achievable in literature [3], surrounded by Ar:CO2 (90%:10%), a commonly used gas in boron-coated gaseous detectors, at atmospheric pressure. A 0.9 µm Mylar layer was used as substrate, which despite being indispensable to support the B4C, does not contribute to the conversion of neutrons, but rather only to the absorption of the reaction secondary products, and therefore should ideally be as thin as practically feasible.…”
Section: Monte Carlo Simulation Resultsmentioning
confidence: 99%
“…Measurements of recoil proton spectra were carried out at room temperature and atmospheric pressure using a 241 Am-Be fast neutron source with an activity of 1.62 • 10 6 Bq. Polyethylene (PE) films with density of 0.90 g/cm 3 were placed directly on the detector package at a distance of 3 mm from the GaAs sensor. The neutron source has a cylinder shape with a height of 3.2 cm and with a diameter of 2.2 cm and was placed on the top of the PE layer.…”
Section: Fast Neutron Measurementsmentioning
confidence: 99%
“…Semiconductor detectors combined with converters are generally used. It is usually Si detectors with various designs [1][2][3][4][5] or diode structures based on wide-bandgap materials [6][7][8]. Also the internal conversion of neutron radiation in semiconductor material is widely used [9][10][11][12].…”
mentioning
confidence: 99%
“…The columnar electrodes are distributed in a square array with 80 µm pitch between columns of the same doping type, with a whole area of 0.57 cm 2 . The complete fabrication process of the 3D sensor and the device geometry is described in [28], although for 20 µm active thickness. For the microdosimetric application, after the sensor fabrication, the supporting wafer is selectively etched resulting on a 'membrane' detector surrounded by a supporting frame.…”
Section: Ultra-thin 3d Silicon Membrane Detectorsmentioning
confidence: 99%