Fabrication and modeling of high-frequency PZT composite thick film membrance resonators

Duval, Fabrice; Dorey, Robert; Wright, Robert V.; Huang, Zhaorong; Whatmore, R. W.

doi:10.1109/tuffc.2004.1350953

Cited by 32 publications

(19 citation statements)

References 24 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…If no barrier layer is present, interdiffusion of Pb and Si will destroy the piezoelectric properties of the PZT. Previously it has been reported that 60 nm of ZrO 2 is a functional diffusion barrier layer for PZT thin films sintered at 700°C [3]. Thus it is attempted to use a ZrO 2 film for PZT thick films.…”

Section: Bottom Electrodementioning

confidence: 99%

“…Thick films result in higher sensitivity and are preferred for MEMS accelerometers and pMUT scan heads utilizing the d 31 mode. Screen printing of PZT results in new fabrication challenges with respect to the electrodes compared to thin film processing [2,3].…”

Section: Introductionmentioning

confidence: 99%

“…1 an insulating barrier layer is preferred as it allows patterning of the bottom electrode. ZrO 2 has successfully been used for thin film PZT [3] and is tested for screen printed PZT in this paper. It is important to note that the type of PZT used in this work is PZ26 from Ferroperm Piezoceramics A/S.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Investigation of Top/Bottom Electrode and Diffusion Barrier Layer for PZT Thick Film MEMS Sensors

et al. 2007

View full text Add to dashboard Cite

Abstract-In this work screen printed piezoelectric Ferroperm PZ26 lead zirconate titanate (PZT) thick film is used for two MEMS devices. A test structure is used to investigate several aspects regarding bottom and top electrodes. 450 nm ZrO 2 thin film is found to be an insufficient diffusion barrier layer for thick film PZT sintered at 850°C. E-beam evaporated Al and Pt is patterned on PZT with a lift-off process with a line width down to 3 µ µ µ µm. The roughness of the PZT is found to have a strong influence on the conductance of the top electrode.

show abstract

Section: Bottom Electrodementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Investigation of Top/Bottom Electrode and Diffusion Barrier Layer for PZT Thick Film MEMS Sensors

et al. 2007

View full text Add to dashboard Cite

show abstract

“…PZT thin-film actuators have wide applications, such as atomic force microscopes (AFM) [57,58], ultrasonic micromotors [59][60][61][62], one-or two-dimensional scanners [63][64][65], microswitches [66], resonators [67,68], and dual-stage actuators/sliders for next-generation computer hard disk drives [1,18,[69][70]. When PZT thin films are incorporated in a mesoor micro-actuator, there are many design challenges to overcome.…”

Section: Design Considerations For Pzt Thin-film Actuators: Measuremementioning

confidence: 99%

PZT Thin-Film Meso- and Micro Devices

Shen

Cao

et al. 2006

Ferroelectrics

View full text Add to dashboard Cite

show abstract

“…The voltage sensitivity is for many MEMS devices proportional to the thickness of the piezoelectric film. Screen printing of PZT on Si substrates has shown promising results [8] and can be used to achieve thicker films compared to other deposition techniques [9,10]. Integration of screen printed PZT thick film and MEMS technology introduces new challenges in the fabrication process as: alignment of the PZT film to the underlying MEMS structures, fine patterning of electrodes on the PZT thick film and a diffusion barrier layer between the PZT and the silicon substrate.…”

Section: Introductionmentioning

confidence: 99%

Triaxial MEMS accelerometer with screen printed PZT thick film

et al. 2010

View full text Add to dashboard Cite

Piezoelectric thick films have increasing interest due to the potential high sensitivity and actuation force for MEMS sensors and actuators. The screen printing technique is a promising deposition technique for realizing piezoelectric thick films in the thickness range from 10-100 μm. In this work integration of a screen printed piezoelectric PZT thick film with silicon MEMS technology is shown. A high bandwidth triaxial accelerometer has been designed, fabricated and characterized. The voltage sensitivity is 0.31 mV/g in the vertical direction, 0.062 mV/g in the horizontal direction and the first mode resonance frequency is 11 kHz. A Finite Element Method (FEM) model is used to validate the measured sensitivity and resonance frequency. Good agreement between the model and the measurements is seen.

show abstract

Fabrication and modeling of high-frequency PZT composite thick film membrance resonators

Cited by 32 publications

References 24 publications

Investigation of Top/Bottom Electrode and Diffusion Barrier Layer for PZT Thick Film MEMS Sensors

Investigation of Top/Bottom Electrode and Diffusion Barrier Layer for PZT Thick Film MEMS Sensors

PZT Thin-Film Meso- and Micro Devices

Triaxial MEMS accelerometer with screen printed PZT thick film

Contact Info

Product

Resources

About