Fabrication and measurement of wireless pressure-sensitive micro-device based on high temperature co-fired ceramics technology

Abstract

Purpose – The paper aims to highlight a wireless pressure-sensitive micro-device with high pressure sensitivity and accuracy. It is based on the partially stabilized Zirconia (PSZ) ceramic material which is capable of excellent elasticity and robustness. Design/methodology/approach – The paper begins with a general introduction to the wireless interrogating method and then the fabrication processes of the device using high temperature co-fired ceramic (HTCC) technology are described in detail. Findings – A passive wireless micro-device made from a novel material-PSZ ceramic on pressure monitoring is fabricated and tested and the authors proved that the device possesses an advantages over some proposed wireless sensors on interrogating distance. The pressure sensitivity of the device is 336 kHz/bar at readout distance 2.5 cm and that is an excellent property. Originality/value – The paper shows a new design scheme for wireless pressure measurement. The future application of the wireless device indicates the problem on external packaging and wire connection could be avoided. The allowable interrogation distance between the device and readout circuit reaches 2.5 cm which is mentioned for the first time so far. The distance is long enough to insert a thermal insulation material which can protect the vulnerable readout circuit from harsh environment, so the research finding is meaningful for the modern measurement technology.

Review of Research Status and Development Trends of Wireless Passive LC Resonant Sensors for Harsh Environments

“…This approach improved the flatness of the sensor cavity and led to better performance. The sensitivity of LTCC pressure sensors can reach −344 kHz/bar [ 18 ], the sensitivity of sensors based on high-temperature cofired ceramic (HTCC) can reach 860 Hz/bar [ 19 , 20 ], and sensors based on zircon ceramics can maintain stable operation at 800 °C for 30 min [ 21 ]. In 2014, researchers at the North University of China proposed improved structural models based on the LTCC, HTCC, and thick-film integrated technologies to improve the performance parameters (e.g., sensitivity, pressure range, operating temperature range, and coupling distance between the sensor and antenna) in harsh environments.…”