2011
DOI: 10.1088/0022-3727/44/18/185002
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Fabrication and magnetic properties of small FePt dot arrays

Abstract: FePt dot arrays with dot sizes ranging from 100 down to 15 nm were fabricated using sputtering, annealing and patterning techniques. The dot diameter distribution and dot position deviation are greater for smaller dot arrays than for larger dot arrays. The dot arrays produced through a sequence of annealing followed by patterning have a large perpendicular magnetic anisotropy resulting from the highly L10-ordered structure and the perpendicular orientation of the [0 0 1] crystalline axis, whereas samples of an… Show more

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Cited by 10 publications
(14 citation statements)
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“…After the annealing treatment at a relatively low temperature of 550 1C, the degree of order as high as 0.94 of the L1 0 -phase FePt in the continuous film was obtained. The array structure of the FePt dots was then made by electron beam lithography followed by ion etching, as described in detail in [13]. To improve the magnetic properties, the annealing process was carried out again on the arrays at 700 1C.…”
Section: Methodsmentioning
confidence: 99%
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“…After the annealing treatment at a relatively low temperature of 550 1C, the degree of order as high as 0.94 of the L1 0 -phase FePt in the continuous film was obtained. The array structure of the FePt dots was then made by electron beam lithography followed by ion etching, as described in detail in [13]. To improve the magnetic properties, the annealing process was carried out again on the arrays at 700 1C.…”
Section: Methodsmentioning
confidence: 99%
“…Because of the large magnetic anisotropy of the FePt dots, a homemade electromagnet device generating pulse magnetic fields was utilized to saturate the samples, while the opposite fields were applied by MOKE equipment [13]. Consequently, the remanent hysteresis loops could be constructed and the remanent coercivities H cr could be determined.…”
Section: Magnetization Measurementsmentioning
confidence: 99%
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“…The preparation procedure of the FePt dot arrays consisting of film sputtering, annealing and patterning was described in detail previously [17,18]. In order to recover the dots from possible defects induced by the ion bombardments in the film patterning [20][21][22], post-fabrication thermal treatments were conducted systematically.…”
Section: Methodsmentioning
confidence: 99%
“…However, these additions often make the magnetic and structural analysis complicated after the film patterning. In our previous work, arrays of FePt dots smaller than 100 nm were investigated experimentally [18]. Besides the high PMA, large coercivity discrepancies between the experimental results and theoretical predictions were observed in the samples.…”
Section: Introductionmentioning
confidence: 99%