Representative magnetoelectric (ME) material Cr 2 O 3 films were prepared on R-cut sapphire (R-Al 2 O 3 ) and SrTiO 3 (STO) substrates with the aim of applying them in perovskite oxide electronic devices. Cr 2 O 3 thin films were deposited using the DC-RF hybrid magnetron sputtering system at different substrate temperatures. When the R-Al 2 O 3 substrate temperature was 550 C, Bragg peaks ðn; " n n; 0; 2nÞ were observed. The full width at half maximum (FWHM) of the rocking curve was smallest at T s ¼ 550 C with a value of 0.52 . The grain size of Cr 2 O 3 increased with substrate temperature in the 400 -600 C range. The lengths of rectangular Cr 2 O 3 grains were in the ranges of 200 -600 nm along the ½ " 1 1101 direction and 100 -300 nm along the ½11 " 2 20 direction. Furthermore, Cr 2 O 3 films were deposited on SrTiO 3 (100) with CeO 2 buffer layers. The Cr 2 O 3 thin film deposited on the smooth CeO 2 buffer layers with the average roughness ðR a Þ ¼ 0:41 nm showed a c-axis orientation; moreover, a Cr 2 O 3 (0001)/CeO 2 (100) == STO(100) crystal relationship was obtained.