Fabrication and characterization of micromachined accelerometers based on PZT thin films

Abstract

In this paper the simple accelerometers based on PZT thin films were developed and cbaracterized. The functions of seismic mass and spring are given by a boss loaded cantilever structure. The strain of the cantilever is detected by a Pb(Zr,Ti)O, thin film. A 2 mm long and 0.8 mm wide cantilever yielded a response of 0.6 mV/g' in the frequency interval between 1 and 600 Hz. With Af = 600Hz a limit of about lmg* at lHz, and less above this frequency, was observed. The response predicted by the analytical model is close to the actual response of the device. A working miniaturized accelerometer prototype could be thus demonstrated.

Recent Progress in Materials Issues for Piezoelectric MEMS

“…Resonators of flexural modes have also been proposed for analog signal processing, as needed for instance at intermediate frequencies (few MHz) in mobile communication 77,78 . At lower frequencies, flexural structures were demonstrated for applications as microphones in photoacoustic gas sensors, 79 as accelerometers, 80 and more recently for energy scavenging 81,82 . Similar to the accelerometer, the latter is combined with a seismic mass, and captures vibrations in a given frequency range.…”

Polar Oxide Thin Films for MEMS Applications

“…Resonators of flexural modes have also been proposed for analogue signal processing, as needed for instance at intermediate frequencies (few MHz) in mobile communication [88,89]. At lower frequencies, flexural structures were demonstrated for applications as microphones in photoacoustic gas sensors [90], as accelerometers [91], and more recently for energy scavenging [79,80]. A further possible application is active damping of motion sensors.…”

Piezoelectrics in Micro and Nanosystems: Solutions for a Wide Range of Applications

“…The measured admittance curves allow for an evaluation of the electro-mechanical coupling factor confirming very well the e 31 f of 12 C/m 2 or even more measured at beams. 42 43 At lower frequencies, flexural structures were demonstrated for applications as microphones in photoacoustic gas sensors, 44 as accelerometers, 45 and more recently for energy scavenging. 46 Similar to the accelerometer, the latter is combined with a seismic mass, and captures vibrations in a given frequency range.…”