Fabrication and characterization of MEMS-based flow sensors based on hot films

Ma, Ronghua; Wang, Yu-Hsiang; Tsai, Yao-Wen; Chang, Cheng-Ho; Lee, Chia-Yen

doi:10.1007/s00542-010-1156-z

Cited by 8 publications

(4 citation statements)

References 10 publications

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“…It was only in the year 1995 (Konzelmann et al 1995) that commercial micro flow sensor find its application with the replacement of conventional flow sensor in cars. Such type of thermal type micro flow sensor or device using MEMS technology is promising for making micro sensor for fluid flow measurement in micro channels (Van Oudheusden 1992;Wu et al 2001;Haga and Esashi 2004;Ma et al 2011). Variety of flow sensing methods are being described in various research article where thermal type flow sensor is very simple, both in structure and integration, thus offering a practical solution in implementation in artery for blood flow rate measurement.…”

Section: Introductionmentioning

confidence: 98%

“…In spite of various techniques already proposed in numerous research papers, still today, there is no single practical implantable arterial blood flow monitoring device commercially available in the market which promises to be superior in every respect for practical use in the human body (Locke et al 2005(Locke et al , 2004. There are number of issues still left, which can only be addressed through research and development of new reliable techniques and devices of thermal type micro flow sensor or sensing device for implantable arterial blood flow measurement.…”

Section: Introductionmentioning

confidence: 99%

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Design and simulation of a thermo transfer type MEMS based micro flow sensor for arterial blood flow measurement

Mistry

Mahapatra

2012

Microsyst Technol

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Thermo transfer type MEMS (Micro Electro Mechanical System) based micro flow sensing device have promising potential to solve the limitation of implantable arterial blood flow rate monitoring. The present paper emphasizes on modeling and simulation of MEMS based micro flow sensing device, which will be capable of implantable arterial blood flow rate measurement. It describes the basic design and model architecture of thermal type micro flow sensor. A pair of thin film micro heaters is designed through MEMS micro machining process and simulated using CoventorWare; a finite element based numerical code. A rectangular cross section micro channel has been modeled where in micro heater and thermal sensors are embedded using the same CoventorWare tools. Some promising and interesting results of thermal dissipation depending upon very small amount of flow rate through the micro channel are investigated. It is observed that measuring the variation of temperature difference between downstream and upstream, the variation of fluid flow rate in the micro channel can be measured. The numerical simulation results also shows that the temperature distribution profile of the heated surface depends upon microfluidic flow rate i.e. convective heat transfer is directly proportional to the microfluidic flow rate on the surface of the insulating membrane. The simplified analytical model of the thermo transfer type flow sensor is presented and verified by simulation results, which are very promising for application in arterial blood flow rate measuring in implantable micro devices for continuous monitoring of cardiac output.

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Section: Introductionmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

Design and simulation of a thermo transfer type MEMS based micro flow sensor for arterial blood flow measurement

Mistry

Mahapatra

2012

Microsyst Technol

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“…Additionally, moving structures such as cantilevers [9,10] and turbines [11,12] can be used to measure the flow rate. Various types of thermal flow sensors, including calorimetric, [13][14][15] time-of-flight, [16][17][18] and hot-wire/hot-film [19][20][21][22][23] sensors, can be used to measure the flow rate based on convective heat transfer caused by heaters and fluid flow. However, these conventional sensors require complex installation processes that depend on the flow channel geometry as well as expensive fabrication methods to create moving/heating components.…”

Section: Introductionmentioning

confidence: 99%

Utilization of Machine Learning Techniques in Hot‐Film Based Airflow Rate Sensors for Improving Flow Measurement

Shin,

Baek,

Choi

et al. 2024

Advanced Intelligent Systems

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This article presents a novel airflow rate sensing method based on the principle of a hot‐film flow sensing device with data‐driven machine learning (ML) models. In addition, to combine the two signals of the sensor (the resistance changes of the heaters) and predict the output (airflow rate), three different ML multivariate regression models, i.e., multiple linear regression (MLR), k‐nearest neighbor (KNN), and deep neural network (DNN) models, are trained and compared using 8400 experimentally obtained data. Using sensor fusion techniques, the average mean absolute error (MAE) and mean squared error (MSE) of the KNN model are determined to be 0.01522 and 0.00132, respectively, in the range of 0–5.07 standard liters per minute. Compared with the average results obtained using only a single input, those obtained using a dual input indicate a significant decrease in the MAE and MSE by 85.69% and 96.68%, respectively. Furthermore, a transient analysis of the ML‐based flow sensor is conducted to investigate the response time and transient characteristics of the MLR, KNN, and DNN models. The results of this study contribute to the advancement of airflow management systems for various industrial applications, such as building ventilation, gas leakage detection, and energy systems.

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“…The applications of MEMS[1] micro-hotplates are increasing rapidly, because they are key components of micro-sensors such as gas sensors, flow/wind sensors, humidity sensors, infrared sources, pressure sensors and so on (Courbat et al, 2010;Dai, 2007;Elmi et al, 2008;Hwang et al, 2011;Kimura et al, 1995;Konz et al, 2005;Ma et al, 2011). Use of the micro-hotplate in sensors can increase the dynamic response and significantly reduce the power consumption due to the small thermal mass of micro-hotplate (Tao et al, 2008).…”

Section: Introductionmentioning

confidence: 99%

Implementation of high-performance MEMS platinum micro-hotplate

et al. 2015

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Purpose – One of the key components of the micro-sensors is MEMS micro-hotplate. The purpose of this paper is to introduce a platinum micro-hotplate with the proper geometry using the analytical model based on the heat transfer analysis to improve both heating efficiency and time constant. Design/methodology/approach – This analytical model exhibits that suitable design for the micro-hotplate can be obtained by the appropriate selection of square heater (LH) and tether width (WTe). Based on this model and requirements of routine sample loading, the size of LH and WTe are chosen 200 and 15 μm, respectively. In addition, a simple micro-fabrication process is adopted to form the suspended micro-heater using bulk micromachining technology. Findings – The experimental results show that the heating efficiency and heating and cooling time constants are 21.27 K/mW and 2.5 ms and 2.1 ms, respectively, for the temperature variation from 300 to 400 K in the fabricated micro-hotplates which are in closed agreement with the results obtained from the analytical model with errors within 5 per cent. Originality/value – Our design based on the analytical model achieves a combination of fast time constant and high heating efficiency that are comparable or superior to the previously published platinum micro-hotplate.

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Fabrication and characterization of MEMS-based flow sensors based on hot films

Cited by 8 publications

References 10 publications

Design and simulation of a thermo transfer type MEMS based micro flow sensor for arterial blood flow measurement

Design and simulation of a thermo transfer type MEMS based micro flow sensor for arterial blood flow measurement

Utilization of Machine Learning Techniques in Hot‐Film Based Airflow Rate Sensors for Improving Flow Measurement

Implementation of high-performance MEMS platinum micro-hotplate

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