Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films

Abstract

We report on the fabrication and characterization of lead zirconate titanate (PZT)-coated cantilever resonators for the realization of piezoelectric nanoelectromechanical systems (NEMS) with integrated actuation and detection capabilities. PZT is deposited by microcontact printing, resulting in a relatively thin PZT film without deterioration of its piezoelectric properties induced by etching damage. The cantilever fabrication process is based on stepper ultraviolet lithography and standard micromaching. Electrical characterization was carried out with a dedicated electrical set-up enabling the devices' resonance frequency to be detected through the piezoelectric response. These characterizations validate the simultaneous actuation and detection capability of the PZT layer. Finally, modeling of the PZT cantilever results in the estimation of the piezoelectric coupling coefficient d*31. We have found excellent large signal d*31 of around 200 pm/V, even for PZT cantilevers with reduced dimensions.

Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films

“…However, studies have shown that some sputtered PZT films on NEMS resonators displayed reduced performance [17,18], likely as a result of a deterioration of the films' piezoelectric characteristics with reduced thickness. Recently, microcontact printed PZT films were found to retain their characteristics with reduced lateral dimensions and thicknesses [19,20]. Our group has already fabricated cantilevers with microcontact printed PZT films and has verified simultaneous actuation and detection capability [20].…”

“…[9][10][11][12][13][14][15][16][17][18][19][20][21] Of the various transduction mechanisms used in MEMS devices, piezoelectricity requires relatively low actuation voltage and offers the possibility of sensing, resulting in integrated devices that are compact, and thus potentially portable. [13][14][15][16]20,21 In this regard, piezoelectric films could be particularly advantageous for transduction in NEMS, since there are few solutions suited to both actuation and sensing at this scale. However, studies have shown that some sputtered PZT films on NEMS resonators displayed reduced performance, 17,18 likely as a result of a deterioration of the films' piezoelectric characteristics with reduced thickness.…”

“…Recently, microcontact printed PZT films were found to retain their characteristics with reduced lateral dimensions and thicknesses. 19,20 The aim of this work is thus to prove that microcontact printed PZT films are good candidates for efficient NEMS transduction. For this, silicon cantilevers of various dimensions integrating microcontact printed PZT thin film were fabricated and characterized.…”

“…Piezoelectric films, which translate mechanical energy into electrical and vice versa, have widely been used for microelectromechanical systems (MEMS) transduction, i.e. actuation and detection [9][10][11][12][13][14][15][16][17][18][19][20][21]. Of the various transduction mechanisms used in MEMS devices, piezoelectricity requires relatively low actuation voltage and offers the possibility of sensing, resulting in integrated devices that are compact, and thus potentially portable [13-16, 20, 21].…”

“…Recently, microcontact printed PZT films were found to retain their characteristics with reduced lateral dimensions and thicknesses [19,20]. Our group has already fabricated cantilevers with microcontact printed PZT films and has verified simultaneous actuation and detection capability [20]. In this work, more cantilevers geometries have been explored which allows the role of dimension on the d 31 value to be assessed.…”