Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films

Abstract

A piezoelectric nanoelectromechanical system (NEMS) with integrated actuation and detection capabilities was fabricated using lead zirconate titanate (PZT) thin films patterned by microcontact printing. PZT-coated cantilever resonators of various dimensions were fabricated to assess the variability in PZT properties as a function of the device dimensions; the microcontact-printed PZT was 281 nm thick. PZT layers of the cantilevers were poled at 107 kV/cm and 150 °C to improve their piezoelectric properties. It was demonstrated that PZT piezoelectrics can be utilized for simultaneous actuation and detection of resonance. The PZT cantilevers were analytically modelled to estimate values of their piezoelectric coefficient d31. Mechanical tip displacement detection of the cantilevers by laser vibrometer was also carried out to validate the estimation of d31.

Dynamics of piezoelectric structures with geometric nonlinearities: A non-intrusive reduced order modelling strategy

“…along the normal to the electrodes, and the free charges are localized in the common surface of the patches and the electrodes. The thickness of the electrode can be neglected for some applications [41], or the electrode can be included in the 3D model as an additional elastic layer [27].…”

“…The dynamic responses were computed with a damping n k ¼ 2%, identical for all the oscillators of the basis. The system (27) was solved by increasing the number N B of bending modes, and no significant difference was observed in the dynamic response. The results shown in Fig.…”

“…We first check the modal convergence, in term of bending modes in (27), of the parametric resonance curve. As shown in Fig.…”

“…As a consequence, the ROM of Eqs. (27) with only N b ¼ 2 bending modes (the first and the third) seems an efficient ROM for the parametric response. Then, we compared the results of our ROM to the results of the direct time-integration with Abaqus.…”

“…Piezoelectric structures in real-life applications can present complex geometries, often laminated with several layers of different materials [27][28][29]. Thus, their modelling often relies on the use of a finite element code, which requires a specific electromechanically coupled variational formulation.…”