Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching

Ruan, Yinlan; Li, Weitang; Jarvis, Ray; Madsen, Nathan; Rode, Andrei; Luther‐Davies, Barry

doi:10.1364/opex.12.005140

Cited by 157 publications

(121 citation statements)

References 10 publications

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“…Selectivity is at its maximum at about 15 % O 2 when the positive effect of oxygen in increasing the appearance of F -that reacts with the layer elements is stronger than its negative effect of producing a passivated oxidized layer. Such a result is in agreement with data from reference [2]. In these conditions, thanks to high rate and selectivity, it was possible to obtain quasi vertical (angle higher than 70 °) ribs with height of 5 microns.…”

supporting

confidence: 91%

“…Some channel waveguides mainly based on arsenic sulphide As 2 S 3 or arsenic selenide As 2 Se 3 were already realised [2, 3 for example]. In reference [2], rib waveguides made by a physical or reactive ion etching of As 2 S 3 were optically characterised at λ = 1.5 microns. In reference [3] channel waveguides were obtained by direct laser writing of the As 2 Se 3 core layer deposited on an As 2 S 3 cladding layer and were characterised at λ = 8.5 microns.…”

Section: Textmentioning

confidence: 99%

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Transmission measurement at 10.6μm of Te2As3Se5 rib waveguides on As2S3 substrate

Vigreux

Bonhomme

Pradel

et al. 2007

Applied Physics Letters

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The feasibility of chalcogenide rib waveguides working at λ = 10.6µm has been demonstrated. The waveguides comprised a several microns thick Te 2 As 3 Se 5 film deposited by thermal evaporation on a polished As 2 S 3 glass substrate and further etched by physical etching in Ar or CF 4 /O 2 atmosphere. Output images at 10.6µm and some propagation losses roughly estimated at 10dB/cm proved that the obtained structures behaved as channel waveguides with a good lateral confinement of the light. The work opens the doors to the realisation of components able to work in the mid and thermal infrared up to 20 µm and even more. TextThe development of single-mode integrated optics components being able to work in the whole range from 1 to 20 microns is of major interest for specific applications related to detection in the mid and thermal-infrared spectral domain : the detection and identification of pollutant gases for environmental control or the direct detection of exoplanetary systems (ESA Darwin Mission [1]), for example. To date, single-mode integrated optics is limited to the near infrared windows H [1.50 -1.80 µm] and K [2.01 -2.42 µm] due to the silica transmission window. One of the promising possibilities to extend the integrated optics concept to the mid-infrared is to use chalcogenide glasses which transparency in the infrared is well-known. Some channel waveguides mainly based on arsenic sulphide As 2 S 3 or arsenic selenide As 2 Se 3 were already realised [2, 3 for example]. In reference [2], rib waveguides made by a physical or reactive ion etching of As 2 S 3 were optically characterised at λ = 1.5 microns. In reference [3] channel waveguides were obtained by direct laser writing of the As 2 Se 3 core layer deposited on an As 2 S 3 cladding layer and were characterised at λ = 8.5 microns. In both examples, the substrates were crystalline silicon substrates (Si/SiO 2 ) and the working domain of the structures was limited at 12 microns, due to the opacity of As 2 S 3 at longer wavelengths. In order to extend the working domain of such waveguides, the only way is the replacement of the sulphide and selenide films by telluride ones. The number of papers dealing with telluride glasses in bulk form has been growing up in the past few years [6-8] but 2 only a few of them concern films [8][9][10]. Moreover in previous works on telluride films, the film thickness was lower than 1 micron [8][9][10] while the film thickness will have to be typically from 4 to 15 microns for use in the mid-IR. In fact, the further the waveguides will be used in the IR, the thicker the film will have to be. For similar reasons, the films will have to be etched on variable depths, typically from 1 to 10 microns. These dimensions (film thickness and rib depth) are much bigger than the ones usually used for the telecommunication wavelengths and previous tests to reach such characteristics are scarce in the literature [2;11].The present work was dedicated to demonstrate the feasibility of channel waveguides based on telluride films...

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supporting

confidence: 91%

Section: Textmentioning

confidence: 99%

Transmission measurement at 10.6μm of Te2As3Se5 rib waveguides on As2S3 substrate

Vigreux

Bonhomme

Pradel

et al. 2007

Applied Physics Letters

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“…To this end we are developing methods for processing low loss chalcogenide glass films to create compact high index contrast planar waveguides for all-optical processing. We have shown that a combination of ultra-fast pulsed laser deposition combined with conventional dry etching can be used to produce relatively low loss ( 0.2dB/cm) chalcogenide glass rib waveguides [6]. Furthermore the inherent photosensitivity of chalcogenides to near-bandgap light has allowed us to write strong Bragg gratings required for the regenerators directly into these waveguides [7].…”

Section: Towards An Integrated Regeneratormentioning

confidence: 99%

Chalcogenide Glasses for All-optical Processing

Luther‐Davies

Madden

Choi

et al. 2006

2006 International Conference on Photonics in Switching

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Abstract:Chalcogenide glasses, which contain S, Se or Te atoms combined with network forming elements such as Ge, As, Sb have the largest third order optical nonlinearity of any inorganic glass. As a result they are attractive candidates for fibre and waveguide devices for all-optical signal processing in the telecommunications bands. In this talk I will review our recent progress in alloptical devices such as regenerators, wavelength converters and other devices in chalcogenide glasses.

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“…Second, being motivated by the recent success in fabricating low-index photonic crystal Fig. 1 Bandgap spectrum of TM (left) and TE (right) polarized waves for a triangular lattice of circular rods (Cx = Cy = 0.575) at ǫ = 5.8 which is the permittivity of the chalcogenide glass waveguides [11].…”

Section: Introductionmentioning

confidence: 99%

Band-gap properties of two-dimensional low-index photonic crystals

Matthews

Kivshar

2005

Appl. Phys. B

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We study the bandgap properties of twodimensional photonic crystals created by a lattice of rods or holes conformed in a symmetric or asymmetric triangular structure. Using the plane-wave analysis, we calculate a minimum value of the refractive index contrast for opening both partial and full two-dimensional spectral gaps for both TM and TE polarized waves. We also analyze the effect of ellipticity of rods and holes and their orientation on the threshold value and the relative size of the bandgap.

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Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching

Cited by 157 publications

References 10 publications

Transmission measurement at 10.6μm of Te2As3Se5 rib waveguides on As2S3 substrate

Transmission measurement at 10.6μm of Te2As3Se5 rib waveguides on As2S3 substrate

Chalcogenide Glasses for All-optical Processing

Band-gap properties of two-dimensional low-index photonic crystals

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