Fabrication and characterization of a shear mode AlN solidly mounted resonator-silicone microfluidic system for in-liquid sensor applications

Sharma, Garima; Liljeholm, Lina; Enlund, Johannes; Bjurström, Johan; Katardjiev, Ilia; Hjort, Klas

doi:10.1016/j.sna.2010.02.009

Cited by 23 publications

(8 citation statements)

References 20 publications

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“…Theoretically, the TSM is not supported in a sandwiched structure based on c-axis oriented AlN or ZnO. One way to tackle this problem involves the fabrication of inclined c-axis oriented piezoelectric film (Link et al, 2006;Sharma et al, 2010).…”

Section: Introductionmentioning

confidence: 99%

Finite element analysis of lateral field excited thickness shear mode film bulk acoustic resonator

Zhou

Yang

Ren

2012

COMPEL - The International Journal for Computation and Mathematics in Electrical and Electronic Engineering

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Purpose -This paper aims to propose a new model to study the relationship between the acoustic properties of the thickness shear mode (TSM) in lateral field excited (LFE) film bulk acoustic wave resonator (FBAR) and the gap distance of the surface electrodes. Design/methodology/approach -In the finite element analysis, harmonic and modal analyses are performed to obtain the admittance spectrum and determine the mechanical vibration mode. The results are used to modify the ideal model used in the theoretical calculation. Findings -In the case of LFE FBAR, the acoustic velocity and electromechanical coupling coefficient (K2) of the TSM decreases as the gap distance decreases and there is a compromise between the exciting effectiveness and the acoustic properties. Originality/value -The paper proposes a new method to study the dependences of the acoustic properties of the lateral field excited FBAR on the gap distances of the surface electrodes through the extraction of the static capacitance based on the finite element simulation results.

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Section: Introductionmentioning

confidence: 99%

Finite element analysis of lateral field excited thickness shear mode film bulk acoustic resonator

Zhou

Yang

Ren

2012

COMPEL - The International Journal for Computation and Mathematics in Electrical and Electronic Engineering

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“…With the increasing importance of clinical diagnosis and medical technology, studies of biochemical sensors have been research hotspots in recent years [7]. Among numerous micro chemical sensors, FBAR has been used for important liquid and gas-phase chemical substance detection due to its signifcant performance and sensitivity [8].…”

Section: Introductionmentioning

confidence: 99%

A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

Zhu

Feng

Lian

2022

Shock and Vibration

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Measurement of a volatile solution is essential for laboratory safety and hospital clinic safety. In this paper, we present an ethanol-sensing and acetone-sensing device using an AlN piezoelectric material-based film bulk acoustic resonator (FBAR). In order to realize volatile solution sensing, the AlN-based FBAR was designed, fabricated, and characterized. In our sensor structure, the upper electrode is a Ti/Au (30 nm/150 nm) composite electrode, the bottom electrode is Mo material with 150 nm thickness, and the piezoelectric sensing material is 0.8 μm thickness AlN. We conducted the experiment of ethanol measurement and acetone measurement by using this FBAR detector on the probe station within the vector network analyzer. The resonance frequency of the FBAR detector decreased as the concentration of ethanol increases, while under the circumstance of acetone concentration increasing, the detector’s response is the opposite. The sensing mechanisms of both ethanol measurement and acetone measurement are discussed in this paper, demonstrating that this FBAR detector could be able to distinguish acetone from ethanol due to different sensing mechanisms.

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“…Surface acoustic wave filters (SAWFs) [1–3] and film bulk acoustic resonators (FBARs) [4–6] have attracted particular attention as a means of achieving high operating frequencies (exceeding gigahertz) in radio frequency (RF) communications. In realizing such devices, the acoustic wave is confined to resonate as a standing wave using either air gap isolated resonators or solidly mounted resonators (SMRs) [7–9]. SMRs typically consist of a Bragg reflector and a piezoelectric film sandwiched between two electrodes.…”

Section: Introductionmentioning

confidence: 99%

Crystalline characteristics of annealed AlN films by pulsed laser treatment for solidly mounted resonator applications

et al. 2019

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AlN films were deposited on Si substrates using a reactive RF magnetron sputtering process and then the films were annealed by using different laser powers and wavelengths (355 nm, 532 nm and 1064 nm). For all three laser systems, the (002) peak intensity was obviously improved following laser irradiation. The improvement in the crystalline property was particularly obtained in the AlN film processed at 355 nm. In particular, given the use of the optimal laser power (0.025 W), the (002) peak intensity was 58.7% higher than that of the as-deposited film. The resonant frequency and 3 dB bandwidth of a SMR filter with an unprocessed AlN film were found to be 2850 MHz and 227.81 MHz, respectively. Following laser treatment with a wavelength of 1064 nm and a power of 0.25 W, the resonant frequency changed from 2850 to 2858 MHz. Moreover, 3 dB bandwidth changed from 227.81 to 202.49 MHz and the return loss of the filter reduced from 17.28 to 16.48 dB. Overall, the results thus show that the frequency response of the SMR filter can be adjusted and the return loss reduced by means of laser treatment with an appropriate wavelength.

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Fabrication and characterization of a shear mode AlN solidly mounted resonator-silicone microfluidic system for in-liquid sensor applications

Cited by 23 publications

References 20 publications

Finite element analysis of lateral field excited thickness shear mode film bulk acoustic resonator

Finite element analysis of lateral field excited thickness shear mode film bulk acoustic resonator

A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

Crystalline characteristics of annealed AlN films by pulsed laser treatment for solidly mounted resonator applications

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