Fabrication and characterisation of substrate-free PZT thick films

Wang, Dazhi; Shi, Peng; Li, Xuemu; Zhou, Peng; Zhao, Kuipeng; Wei, Yingjin; Jiang, Chongyang; Liang, Junsheng; Dorey, Robert A.

doi:10.1016/j.ceramint.2018.05.030

Cited by 15 publications

(6 citation statements)

References 25 publications

(31 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Most publications discuss the PFM analysis of piezo/ferroelectric properties in thick films prepared by low-density deposition methods, such as screen-printing [60,[108][109][110][111][112], electrophoretic deposition [61], tape-casting [113] or inkjet printing [114]. Only a few papers report the PFM analysis of thick films prepared by high-density deposition methods [115,116]. Some literature [117,118] can also be found on the PFM analysis of films prepared by adapted thin-film methods [27], for example, multiple spin or dip coatings, but these methods are not the subject of this review.…”

Section: Pfm Studies Of the Domain Structure In Polycrystalline Thickmentioning

confidence: 99%

Investigations of ferroelectric polycrystalline bulks and thick films using piezoresponse force microscopy

Uršič,

Prah

2019

Proc. R. Soc. A.

View full text Add to dashboard Cite

In recent years, ferroelectric/piezoelectric polycrystalline bulks and thick films have been extensively studied for different applications, such as sensors, actuators, transducers and caloric devices. In the majority of these applications, the electric field is applied to the working element in order to induce an electromechanical response, which is a complex phenomenon with several origins. Among them is the field-induced movement of domain walls, which is nowadays extensively studied using piezoresponse force microscopy (PFM), a technique derived from atomic force microscopy. PFM is based on the detection of the local converse piezoelectric effect in the sample; it is one of the most frequently applied methods for the characterization of the ferroelectric domain structure due to the simplicity of the sample preparation, its non-destructive nature and its relatively high imaging resolution. In this review, we focus on the PFM analysis of ferroelectric bulk ceramics and thick films. The core of the paper is divided into four sections: (i) introduction; (ii) the preparation of the samples prior to the PFM investigation; (iii) this is followed by reviews of the domain structures in polycrystalline bulks; and (iv) thick films.

show abstract

Section: Pfm Studies Of the Domain Structure In Polycrystalline Thickmentioning

confidence: 99%

Investigations of ferroelectric polycrystalline bulks and thick films using piezoresponse force microscopy

Uršič,

Prah

2019

Proc. R. Soc. A.

View full text Add to dashboard Cite

show abstract

“…As the parameter optimization process was based on FEA, it did not consider the influence of the adhesive layer, making the simulation process simple. Thick-film piezoelectric elements were printed on the substrate, and the d 33 value of this kind pure PZT thick film was obtained from our previous work, which was around 140 pC/N [ 32 ]. Then, the d 31 can be inferred from the relation described by C. Ayelas and L. Nicub [ 33 ].…”

Section: Methodsmentioning

confidence: 99%

“…The printing composite slurry used for making the PZT thick film element was prepared by thoroughly mixing the PZT powder and PZT sol. The details of the properties as well as the proportions of the composite slurry were described in previous studies [ 32 , 34 ]. Here, the slurry with a 1:1 ratio of PZT sol: PZT powder that was ball milled for 50 h was selected for the preparation of the printing material.…”

Section: Methodsmentioning

confidence: 99%

Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

et al. 2021

Self Cite

View full text Add to dashboard Cite

This paper proposes a novel way of preparing a PZT thick film micro vibrator using the electrohydrodynamic jet (E-Jet) printing technique. Initially, a micro piezoelectric vibrator was simulated and designed for obtaining optimized structure, which has a total thickness of less than 600 µm. Subsequently, the PZT thick film element was directly printed on the elastic body using the E-Jet printing. This method avoids the glue fabrication process involved in the bulk piezoelectric fabrication, thus avoiding the limits of voltage drops, isolating and absorbing amplitude usually occurred in the vibrator having glue interface. It was observed that B02 and B03 modes were generated at frequencies of 29.74 and 79.14 kHz, respectively, and the amplitudes of B02 and B03 modes were 406 and 176 nm, respectively. The error between the simulation and test result in the B03 modal is only 0.35%, which indicates the accuracy of the simulation analysis and the fabrication process. The PZT thick film traveling-wave micro vibrator successfully realized bidirectional rotation of a rotor, with a maximum speed of 681 rpm, which also shows a linear relationship between excitation voltage and rotary speed. This paper provides an effective method for preparing a micro piezoelectric vibrator for MEMS ultrasonic devices, which simplifies the manufacturing process and enhances the performance of the piezoelectric vibrator.

show abstract

“…55 PZT was the rst widely used material due to its high piezoelectric coefficient (d 33 = 140 pm V −1 ). 56 It has been reported that electrospun PVDF/PZT nanobers prepared by doping different concentrations of PZT could possess a higher b-phase content compared to pure PVDF. When PZT was supplied at a concentration of 10 vol%, the maximum effective voltage could reach 79.71 mV at a resistive load of 1 MU and 47.2 mV at a non-resistive load.…”

Section: Doping Modification Of Pvdf Nanofiber Filmsmentioning

confidence: 99%

Electrospun PVDF-based piezoelectric nanofibers: materials, structures, and applications

Zhang

Liu

et al. 2023

Nanoscale Adv.

View full text Add to dashboard Cite

show abstract

Fabrication and characterisation of substrate-free PZT thick films

Cited by 15 publications

References 25 publications

Investigations of ferroelectric polycrystalline bulks and thick films using piezoresponse force microscopy

Investigations of ferroelectric polycrystalline bulks and thick films using piezoresponse force microscopy

Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

Electrospun PVDF-based piezoelectric nanofibers: materials, structures, and applications

Contact Info

Product

Resources

About