Extreme ultraviolet broadband imaging spectrometer using dispersion-matched zone plates

Abstract

We present simultaneous 1D imaging and broadband spectroscopy of a laser-produced plasma (LPP) source of extreme ultraviolet light, using a tapered zone plate that is matched to the dispersion of a transmission grating. We describe the design and fabrication of the zone plates in the 5–80 nm wavelength regime with designed spatial resolution of ∼10 µm and spectral resolution of ∼0.8 nm. Subsequently, we benchmark the imaging spectrometer with a solid tin target LPP. Plane wave propagation simulations qualitatively match the experimental results and confirm the device performance.