We present the results of the calibration of a channeltron-based electrostatic analyzer operating in time-of-flight mode (ESA-ToF) using tin ions resulting from laser-produced plasma, over a wide range of charge states and energies. Specifically, the channeltron electron multiplier detection efficiency and the spectrometer resolution are calibrated, and count rate effects are characterized. With the obtained overall response function, the ESA-ToF is shown to accurately reproduce charge-integrated measurements separately and simultaneously obtained from a Faraday cup (FC), up to a constant factor the finding of which enables absolute cross-calibration of the ESA-ToF using the FC as an absolute benchmark. Absolute charge-state-resolved ion energy distributions are obtained from ns-pulse Nd:YAG-laser-produced microdroplet tin plasmas in a setting relevant for state-of-the-art extreme ultraviolet nanolithography.

When exposed to a thermal beam of hydrogen atoms, gas-phase coronene cations C24H12+ can be sequentially hydrogenated. This process is accompanied by a gradual transition of the electronic structure from aromatic to aliphatic. The planar very stable coronene structure transforms into the significantly weaker corrugated structure, typical for aliphatic molecules. In this study, we have investigated the hydrogenation of 5 smaller polycyclic aromatic hydrocarbon cations using a combination of radiofrequency ion trapping with time-of-flight mass spectrometry. Anthracene (C14H10+), pyrene (C16H10+), triphenylene (C18H12+), tetracene (C18H12+) and 8-9-benzofluoranthene (C20H12+) only cover a small mass range, but differ in carbon/hydrogen ratio, number of outer-edge sites and overall structure. We have observed qualitatively similar initial hydrogenation patterns for all 5 molecular ions, with odd hydrogenation states being dominant. Strong quantitative differences in hydrogenation and in attachment-induced fragmentation were found. For the case of pyrene cations, we have also investigated exposure to atomic D. Clear lines of evidence for HD/D2 abstraction reactions of Eley–Rideal type were found, as previously observed for coronene cations. Graphical abstract

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The emission properties of tin plasmas, produced by the irradiation of preformed liquid tin targets by several-ns-long 2 µm-wavelength laser pulses, are studied in the extreme ultraviolet (EUV) regime. In a two-pulse scheme, a pre-pulse laser is first used to deform tin microdroplets into thin, extended disks before the main (2 µm) pulse creates the EUV-emitting plasma. Irradiating 30-to 300 µm-diameter targets with 2 µm laser pulses, we find that the efficiency in creating EUV light around 13.5 nm follows the fraction of laser light that overlaps with the target. Next, the effects of a change in 2 µm drive laser intensity (0.6-1.8 × 10 11 W cm −2 ) and pulse duration (3.7-7.4 ns) are studied. It is found that the angular dependence of the emission of light within a 2% bandwidth around 13.5 nm and within the backward 2π hemisphere around the incoming laser beam is almost independent of intensity and duration of the 2 µm drive laser. With increasing target diameter, the emission in this 2% bandwidth becomes increasingly anisotropic, with a greater fraction of light being emitted into the hemisphere of the incoming laser beam. For direct comparison, a similar set of experiments is performed with a 1 µm-wavelength drive laser. Emission spectra, recorded in a 5.5-25.5 nm wavelength range, show significant self-absorption of light around 13.5 nm in the 1 µm case, while in the 2 µm case only an opacity-related broadening of the spectral feature at 13.5 nm is observed. This work demonstrates the enhanced capabilities and performance of 2 µm-driven plasmas produced from disk targets when compared to 1 µm-driven plasmas, providing strong motivation for the use of 2 µm lasers as drive lasers in future high-power sources of EUV light.

We present a calibrated spectrum in the 5.5–265.5 nm range from a microdroplet-tin Nd:YAG-laser-produced plasma under conditions relevant for the production of extreme ultraviolet (EUV) light at 13.5 nm for nanolithography. The plasma emission spectrum obtained using a custom-built transmission grating spectrometer results from a careful calibration of a series of filters enabling measurements free of any higher diffraction orders. Specifically, Zr, Si, and Al thin-foil filters and bulk LiF, MgF2, and UV fused silica filters are employed. A further filter using four SiC mirrors is used to record the otherwise inaccessible 40–100 nm range. The resulting corrected and concatenated spectra are shown to accurately match in their respective overlap regions. The possibility to measure spectra over this broad range enables the optimization of current and future sources of EUV light for nanolithography by providing the diagnostics required for minimizing the emission of unwanted wavelength bands.

We present a method to obtain the individual charge-state-dependent kinetic-energy distributions of tin ions emanating from a laser-produced plasma from their joint overlapping energy distributions measured by means of a retarding field energy analyzer (RFA). The method of extracting charge state specific parameters from the ion signals is described mathematically, and reinforced with experimental results. The absolute charge-state-resolved ion energy distributions is obtained from ns-pulse Nd:YAG-laser-produced microdroplet tin plasmas in a setting relevant for state-of-the-art extreme ultraviolet nanolithography.

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