2014
DOI: 10.1038/srep06415
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Extreme tunability in aluminum doped Zinc Oxide plasmonic materials for near-infrared applications

Abstract: Plasmonic materials (PMs), featuring large static or dynamic tunability, have significant impact on the optical properties due to their potential for applications in transformation optics, telecommunications, energy, and biomedical areas. Among PMs, the carrier concentration and mobility are two tunable parameters, which control the plasma frequency of a metal. Here, we report on large static and dynamic tunability in wavelengths up to 640 nm in Al-doped ZnO based transparent conducting degenerate semiconducto… Show more

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Cited by 105 publications
(78 citation statements)
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References 31 publications
(36 reference statements)
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“…Details of the AZO deposition process were reported elsewhere. 20 In the present case, the ratio of the Zn:Al in the ALD cycle was maintained at 30:1, and the corresponding measured atomic concentration of Al was ∼ 3% (See Fig. 1 of Ref.…”
Section: Methodsmentioning
confidence: 68%
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“…Details of the AZO deposition process were reported elsewhere. 20 In the present case, the ratio of the Zn:Al in the ALD cycle was maintained at 30:1, and the corresponding measured atomic concentration of Al was ∼ 3% (See Fig. 1 of Ref.…”
Section: Methodsmentioning
confidence: 68%
“…1 of Ref. 20). During this deposition, the temperature was maintained at 85-90 0 C. The thickness and the resistivity of the AZO film were 2500 Å and ∼4 x10 -2 ohm-cm, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…The carrier concentration of AZO has been shown to be electrically tunable or thermally tunable via voltage biasing [39,40]. This change in carrier concentration is seen as a change in plasma frequency for AZO that effects the value of its permittivity Figure 4.…”
Section: Tunable Tla In Azomentioning
confidence: 99%
“…The optical properties of plasmonic and optical devices in semiconductors and transparent metal oxides can be tuned by altering their carrier concentration through voltages or heat [20,[32][33][34][35][36][37][38][39][40][41]. Very recently, indium tin oxide (ITO) and Ga-doped ZnO have been used to realize tunable TLA [33][34][35][36][37][38][39][40][41].…”
Section: Introductionmentioning
confidence: 99%
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