Extraction characteristics of a high current metal ion source

Review of Scientific Instruments

et al. 2012

A thin-walled aluminum (Al) hollow electrode has been inserted into an ion source to serve as an electrode for a radio frequency magnetron discharge. The produced plasma stabilized by argon (Ar) gas sputters the Al electrode to form a beam of Al(+) and Ar(+) ions. The total beam current extracted through a 3 mm diameter extraction hole has been 50 μA, with the Al(+) ion beam occupying 30% of the total beam current.

Section: Introductionmentioning

confidence: 99%

Hollow target magnetron-sputter-type solid material ion source

Sasaki

Ieki

Review of Scientific Instruments

et al. 2012

“…A high temperature oven can create substantial vapor pressure of metallic material, and the produced metal atoms in the ion source chamber are ionized by energetic electrons injected to plasma from high temperature cathodes. 1 Molecular gases containing metal atoms are introduced into ion sources, and reactive gases that create metal ions upon interaction with solid materials containing metal are also used to produce metal ions. 2 Negative ions of metal can be produced by Cs sputtering from solid materials, 3 while sputtering process in plasma has been considered as one of the most promising methods to form positive metallic ion beams.…”

Section: Introductionmentioning

confidence: 99%

Hollow metal target magnetron sputter type radio frequency ion source

Yamada

Review of Scientific Instruments

Tsubouchi³

et al. 2014

A 70 mm diameter 70 mm long compact ion source equipped with a hollow sputtering target has been designed and tested. The hollow sputtering target serves as the radio frequency (RF) plasma excitation electrode at 13.56 MHz. A stable beam of Cu(+) has been extracted when Ar was used as the discharge support gas. In the extracted beam, Cu(+) had occupied more than 85% of the total ion current. Further increase in Cu(+) ions in the beam is anticipated by increasing the RF power and Ar pressure.

“…Metal ions are produced through several different ways. Metal vapor can be produced by a high temperature oven, and the produced metal vapor can be ionized by a hot cathode discharge in the ion source chamber [1]. However, a stable operation over long period of time requires some counter measure to cope with the problem of metal vapor condensation to the ion source components.…”

Section: Introductionmentioning

confidence: 99%

Metal negative ion beam extraction from a radio frequency ion source

Kanda

Yamada

AIP Conference Proceedings

et al. 2015

Abstract.A metal ion source of magnetron magnetic field geometry has been designed and operated with a Cu hollow target. Radio frequency power at 13.56 MHz is directly supplied to the hollow target to maintain plasma discharge and induce self-bias to the target for sputtering. The extraction of positive and negative Cu ion beams have been tested. The ion beam current ratio of Cu + to Ar + has reached up to 140% when Ar was used as the discharge support gas. Cu -ion beam was observed at 50 W RF discharge power and at a higher Ar gas pressure in the ion source. Improvement of poor RF power matching and suppression of electron current is indispensable for a stable Cu -ion beam production from the source.