1999
DOI: 10.1063/1.123722
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Extensions of the Stoney formula for substrate curvature to configurations with thin substrates or large deformations

Abstract: Two main assumptions which underlie the Stoney formula relating substrate curvature to mismatch strain in a bonded thin film are that the film is very thin compared to the substrate, and the deformations are infinitesimally small. Expressions for the curvature-strain relationship are derived for cases in which these assumptions are relaxed, thereby providing a basis for interpretation of experimental observations for a broader class of film-substrate configurations.

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Cited by 286 publications
(216 citation statements)
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“…Similar to deformation of a substrate, in-planes stresses can be introduced in a coating due to a mismatch in thermal expansion coefficients between the polymer and the metal substrate. Thus in-plane residual stresses of thermal origin were measured with the curvature based techniques [8][9][10][11], double cantilever test [2,[12][13][14] and other less common experimental methods [15][16][17]. High compressive stresses are also found in coatings deposited on various substrates.…”
Section: E-mail Address: Afedorov@rugnl (Av Fedorov)mentioning
confidence: 99%
“…Similar to deformation of a substrate, in-planes stresses can be introduced in a coating due to a mismatch in thermal expansion coefficients between the polymer and the metal substrate. Thus in-plane residual stresses of thermal origin were measured with the curvature based techniques [8][9][10][11], double cantilever test [2,[12][13][14] and other less common experimental methods [15][16][17]. High compressive stresses are also found in coatings deposited on various substrates.…”
Section: E-mail Address: Afedorov@rugnl (Av Fedorov)mentioning
confidence: 99%
“…[7][8][9] Freund et al also noted that the assumption of a uniform curvature is not valid for large nonlinear deformations. 7,9 The validity of the kinematic assumption of a uniform curvature is examined in this paper. Two different models of the film/substrate system are examined and compared.…”
Section: Introductionmentioning
confidence: 99%
“…Stoney's formula has been modified many times for the purpose of evaluating bilayer and multilayer structures with arbitrary layer thickness ratios. [2][3][4][5][6][7][8][9][10][11][12][13] Klein made comments on the accuracy of some modified Stoney formulas mentioned above. 14 The assumption of a uniform curvature is explicitly or implicitly used in the context of bilayer or multilayer structures modeled as either beams or plates.…”
Section: Introductionmentioning
confidence: 99%
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“…Once deposited, the curvature radius of samples is measured again and stress is calculated at the interface using Stoney formula [10]: (1) Where R is the curvature radius after copper deposition; R 0 is the initial curvature; E s the substrate Young modulus; s the substrate Poisson's ratio; d s the substrate thickness and d f film thickness. We have to note that this expression is an approximation, whose validity is widely accepted however, under certain assumptions [11][12].…”
Section: Characterization and Measurementsmentioning
confidence: 99%