Exploration of Plasma-Enhanced Chemical Vapor Deposition as a Method for Thin-Film Fabrication with Biological Applications

Abstract

Chemical vapor deposition (CVD) has been used historically for the fabrication of thin films composed of inorganic materials. But the advent of specialized techniques such as plasma-enhanced chemical vapor deposition (PECVD) has extended this deposition technique to various monomers. More specifically, the deposition of polymers of responsive materials, biocompatible polymers, and biomaterials has made PECVD attractive for the integration of biotic and abiotic systems. This review focuses on the mechanisms of thin-film growth using low-pressure PECVD and current applications of classic PECVD thin films of organic and inorganic materials in biological environments. The last part of the review explores the novel application of low-pressure PECVD in the deposition of biological materials.

Polarized raman spectroscopy for determining the orientation of di‐d‐phenylalanine molecules in a nanotube

“…Deposition was carried out under low vacuum conditions, with low chamber pressure (0.03 Torr), low argon flow rate (99.99% purity, flow rate of 10 cm 3 /min), and low radio frequency power (30 W) . The RF power was pulsed with frequency ranging between 100 to 1000 Hz and duty cycles ranging from 25% to 100%, because previous studies have reported that using a low power pulsed plasma helps the activation as well as the retention of chemical activity of the deposited molecule . The morphology of the PECVD deposited di‐ d ‐phenylalanine nanotubes are shown in Fig.…”

“…[3] The RF power was pulsed with frequency ranging between 100 to 1000 Hz and duty cycles ranging from 25% to 100%, because previous studies have reported that using a low power pulsed plasma helps the activation as well as the retention of chemical activity of the deposited molecule. [57,58] The morphology of the PECVD deposited di-D-phenylalanine nanotubes are shown in Fig. S1.…”

Solventless Synthesis and Patterning of UV‐Responsive Poly(allyl methacrylate) Film

“…[21,22] Plasma-enhanced chemical vapor deposition (PECVD) has been employed to synthesize PAMA. [23,24] The excessive energy from plasma, however, damaged allyl groups, resulting in a fully crosslinked polymer. [25] Compared with PECVD, initiated chemical vapor deposition (iCVD) is a much milder and more controllable method, thus more suitable for synthesizing functional thin films.…”

“…Vapor‐based approaches could also compensate for the shortcomings caused by the use of organic solvents, such as insoluble reactants, residual contaminants from solvent, and damage to substrates . Plasma‐enhanced chemical vapor deposition (PECVD) has been employed to synthesize PAMA . The excessive energy from plasma, however, damaged allyl groups, resulting in a fully crosslinked polymer .…”

Surface modification of polypropylene for enhanced layer‐by‐layer deposition of polyelectrolytes

“…Significant advances in the surface modification of materials have been made over the last decades and is increasingly becoming a common component in the design of biomaterials and medical devices. In early application, surface chemistry was modified in devices involved in blood‐contact applications (e.g., catheters, tubing, dialysis equipment) to prevent clot formation . Surface modification has also been used in multiple other applications to provide medical devices with enhanced wettability and antifouling properties as well as to enable grafting of bioactive agents for drug delivery applications .…”