Experimental Study of the Low-Pressure Water Jet Assisted Laser Processing of Al2O3 Ceramic

Genfu, 袁根福 Yuan; Zhiwei, 逄志伟 Pang; Jinhua, 王金华 Wang; Chunying, 陈春映 Chen

doi:10.3788/al20133303.0278

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“…EDM technology is also utilized to machine Si 3 N 4 , but the process requires an auxiliary electrode on account of its non-conductive property and this technology is inefficient. Laser has many exceptional properties like high energy density and fine focus that can be used to machine any material, but laser machining alone can cause heat damage and crack in ceramic surface [3][4][5][6].Then, Yuan Genfu proposed and studied laser-chemical combined etching and low-pressure water jet-assisted laser machining [7,8]. Park and Kang performed some researches, in which the method of vibration-assisted laser machining was used to machine workpiece in anhydrous conditions [9,10].…”

Section: Introductionmentioning

confidence: 99%

Study on Ultrasonic-Assisted Laser Machining of Si3N4

Yao

Wang

et al. 2016

KEM

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Si3N4 is difficult to be machined due to its hard and brittle nature. In order to improve its machining quality, a new method of ultrasonic-assisted laser machining is proposed. The machining device is established including Nd: YAG pulsed laser, ultrasonic vibration stage and water flow system. Etching experiments of laser machining with and without sample vibration in anhydrous conditions and in water conditions are studied respectively. A VM-3030E two-dimensional image measuring instrument is applied to detect shape and measure dimension of the sample. Microstructure morphology of the sample is observed by a JSM-7500F scanning electron microscope. Experimental results show that there are fewer slags on inner surfaces of V-shaped grooves when laser machining with water flow. The surface quality and depth-to-width ratio of grooves machined by laser with vibration on sample are improved significantly in comparison with those without vibration. The depth-to-width ratio of groove machined by laser with 90.1W vibration power is near twice than that without vibration.

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