Experimental Study of Low-Pressure Water Jet Assisted Laser Drilling on Al&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt; Ceramic

Lu, Ping; Yuan, Gen Fu

doi:10.4028/www.scientific.net/amm.599-601.22

Cited by 9 publications

(3 citation statements)

References 6 publications

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“…Also, it was suggested that adopting this method would deliver homogenous quality finished parts. Low-pressure water jet-assisted laser drilling was carried out by Lu and his research group [ 58 ] for drilling alumina ceramic with various drilling parameters. Results reveal that the use of water jet assisted drilling decreases the chance of recast and micro-crack formation over the machined surface of ceramic material.…”

Section: Laser Machining Of Ceramicsmentioning

confidence: 99%

Laser-Based Manufacturing of Ceramics: A Review

et al. 2023

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Ceramics are widely used in microelectronics, semiconductor manufacturing, medical devices, aerospace, and aviation, cutting tools, precision optics, MEMS and NEMS devices, insulating components, and ceramic molds. But the fabrication and machining of the ceramic-based materials by conventional processes are always difficult due to their higher hardness and mechanical properties. Therefore, advanced manufacturing techniques are being preferred for these advanced materials, and out of that, laser-based processes are widely used. The benefits of laser fabrication and machining of ceramics include high precision, reduced thermal damage, non-contact processing, and the ability to work with complex geometries. Laser technology continues to advance, enabling even more intricate and diverse applications for ceramics in a wide range of industries. This paper explains various laser based ceramic processing techniques, such as selective laser sintering and melting, and laser machining techniques, such as laser drilling, etc. Identifying and optimizing the process parameters that influence the output quality of laser processed parts is the key technique to improving the quality, which is also focused on in this paper. It aims to facilitate the researchers by providing knowledge on laser-based manufacturing of ceramics and their composites to establish the field further.

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Section: Laser Machining Of Ceramicsmentioning

confidence: 99%

Laser-Based Manufacturing of Ceramics: A Review

et al. 2023

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“…Underwater femtosecond laser processing can effectively inhibit the occurrence of oxidation reactions, the surface after processing is cleaner, and there is almost no particle impurity debris. Lu et al 30 used a method of laser machining combined with a lowpressure water jet to conduct experimental research on micropore processing of Al 2 O 3 ceramics. The erosion effect of the water jet can significantly reduce slag, recast layer and microcracks, and greatly improve the quality of the microhole.…”

Section: Introductionmentioning

confidence: 99%

A study of laser machining combined with dynamic chemical etching in micro‐hole drilling of 2.5D SiC_f/SiC composites

Zhao

Sun

Zhang

et al. 2023

Int J Applied Ceramic Tech

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In this study, we used a novel method of laser machining combined with dynamic chemical liquid etching (LMDCE) to drill holes in 2.5D SiCf/SiC ceramic matrix composites (CMC‐SiC). A chemical solution that could quickly remove the recast layer without damaging the substrate was selected. Severe recast layer and microcrack defects were observed when laser machining was performed in the air. The surface of the material was highly carbonized due to the thermal effect of the laser. The effect of different defocus amounts and scanning speeds on the hole taper was studied. A lower scanning speed can ensure that a smaller taper is obtained by the microhole. The bore diameter of the holes processed with a defocusing amount of 0 or −1 mm is more uniform. The results show that with the assistance of a dynamic chemical solution, the fibers break neatly into needle‐like shapes, the thermal effect of the laser on the ceramic substrate is significantly weakened, the microhole shows good roundness, and there are no recast layers and oxides on the sample surface. In addition, microcracks are significantly reduced, and high‐quality microholes without a heat‐affected zone (HAZ) are machined. The method provides a new idea on how to eliminate machining defects and achieve higher‐quality micromachining for ceramic matrix composites.

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“…Biswas et al [6][7][8] studied the effects of pulse frequency, pulse width, air pressure, and focal length on the circularity and taper of holes in TiN-Al2O3 ceramic laser drilling. Iwatani et al [9] used nanosecond Nd:YAG lasers with different parameters to drill the underwater SiC ceramic, while Chen [10] and Lu [11] performed the similar experiments on Al2O3 ceramic. Bharatish et al [12] studied the effects of laser parameters on the circularity and heat affected zone of microholes in Al2O3.…”

Section: Introductionmentioning

confidence: 99%

Effect of Laser Processing Parameters on Microhole Quality of Aluminium Nitride Ceramics

Yang

Hao

Wang

et al. 2021

KEM

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A picosecond laser in spin-cutting mode was used to drill 500μm diameter microholes on 150μm thick aluminium nitride ceramic. The effects of laser processing parameters such as the laser power, scanning speed, and defocus amount on the microhole quality were studied. The results show that as the laser power increases, the inlet and outlet diameters of the holes increase, the taper decreases slightly, and the thickness of the recast layer decreases evidently. The scanning speed has no obvious effect on the diameter and taper of the hole; however, the hole can not be drilled through when the speed is too large. Positive defocus can effectively reduce the taper of the hole. Under 28.5W laser power, 400Hz frequency, 200mm/s scanning speed, and zero defocus amount conditions, high-quality microholes with a taper of 0.85° were obtained.

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Experimental Study of Low-Pressure Water Jet Assisted Laser Drilling on Al<sub>2</sub>O<sub>3</sub> Ceramic

Cited by 9 publications

References 6 publications

Laser-Based Manufacturing of Ceramics: A Review

Laser-Based Manufacturing of Ceramics: A Review

A study of laser machining combined with dynamic chemical etching in micro‐hole drilling of 2.5D SiC_f/SiC composites

Effect of Laser Processing Parameters on Microhole Quality of Aluminium Nitride Ceramics

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Experimental Study of Low-Pressure Water Jet Assisted Laser Drilling on Al<sub>2</sub>O<sub>3</sub> Ceramic

Cited by 9 publications

References 6 publications

Laser-Based Manufacturing of Ceramics: A Review

Laser-Based Manufacturing of Ceramics: A Review

A study of laser machining combined with dynamic chemical etching in micro‐hole drilling of 2.5D SiCf/SiC composites

Effect of Laser Processing Parameters on Microhole Quality of Aluminium Nitride Ceramics

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A study of laser machining combined with dynamic chemical etching in micro‐hole drilling of 2.5D SiC_f/SiC composites