2020
DOI: 10.1109/access.2020.2994625
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Experimental Study of High Performance 4H-SiC Floating Junction JBS Diodes

Abstract: This paper reports the demonstration of a high performance 4H-SiC floating junction junction barrier Schottky (FJ_JBS) rectifier with a 30µm, 6×10 15 cm −3-doped epitaxial layer. Extensive simulations have been performed to design, optimize and analyze the structure of the FJ_JBS rectifier. The fabricated FJ_JBS shows that breakdown voltage (BV) and differential R on,sp are 3.4 kV, yielding the highest BV value reported for 4H-SiC FJ diodes, and 5.67 m •cm 2 , respectively. Compared with the conventional JBS, … Show more

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Cited by 8 publications
(2 citation statements)
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References 33 publications
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“…Figure 2 shows the influence of input parameters on Ron and BV based on TCAD Sentaurus simulation. Through simulation results, the reasonable range of Epidop, Impdop, L, and Impthickness should be 3 × 10 15 –1 × 10 16 cm −3 , 3 × 10 17 –1 × 10 18 cm −3 , 0.2–0.6 µm, 0.15–0.4 µm [ 8 ]. Table 2 lists the specific values of each input parameter.…”
Section: Gan Jbs Diode Tcad Modeling and Simulationmentioning
confidence: 99%
“…Figure 2 shows the influence of input parameters on Ron and BV based on TCAD Sentaurus simulation. Through simulation results, the reasonable range of Epidop, Impdop, L, and Impthickness should be 3 × 10 15 –1 × 10 16 cm −3 , 3 × 10 17 –1 × 10 18 cm −3 , 0.2–0.6 µm, 0.15–0.4 µm [ 8 ]. Table 2 lists the specific values of each input parameter.…”
Section: Gan Jbs Diode Tcad Modeling and Simulationmentioning
confidence: 99%
“…Schottky barrier lowing model and tunnelling models are also involved in the simulations to characterise the SBD performances [17]. Related model parameters have been optimised and applied in previous simulation studies [3,18,19].…”
Section: Device Structure and Simulation Setupmentioning
confidence: 99%