Experimental study of fullerene-family formation using radio-frequency-discharge reactive plasmas

Ishida, Hiroyasu; Satake, N.; Jeong, Goo‐Hwan; Abe, Yusuke; Hirata, Takamichi; Hatakeyama, Rikizo; Tohji, Kazuyuki; Motomiya, Kenichi

doi:10.1016/s0040-6090(02)00007-x

Cited by 25 publications

(16 citation statements)

References 15 publications

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“…The resulting properties are a function of the composition, structural order and the micro/ nanostructure of the coatings [2]. In addition, particles of different sizes and shapes grow naturally in RF plasmas [3][4][5][6][7]. Carbon based particles like fullerenes [3], and carbon spheres [4,6,7] have been reported.…”

Section: Introductionmentioning

confidence: 99%

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Sub-micron size carbon structures synthesized using plasma enhanced CVD, without external heating and no catalyzer action

Valderrama

Favre

Bhuyan

et al. 2010

Surface and Coatings Technology

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Section: Introductionmentioning

confidence: 99%

“…In addition, particles of different sizes and shapes grow naturally in RF plasmas [3][4][5][6][7]. Carbon based particles like fullerenes [3], and carbon spheres [4,6,7] have been reported. Carbon spheres can be produced with control in chemical composition, crystallinity, and diameter [8], allowing a wide spectrum of applications.…”

Section: Introductionmentioning

confidence: 99%

Sub-micron size carbon structures synthesized using plasma enhanced CVD, without external heating and no catalyzer action

Valderrama

Favre

Bhuyan

et al. 2010

Surface and Coatings Technology

View full text Add to dashboard Cite

“…RF-discharge reactive plasmas have been successfully used to produce carbon nanostructures such as fullerenes and nanotubes from gaseous mixtures of CH 4 , H 2 , and Ar, at pressures in the range 10 -3 -10 Torr. [43] In Figure 6 a scheme of the apparatus is shown. The plasma is generated…”

Section: Plasma-enhanced Cvdmentioning

confidence: 99%

The World of Carbon Nanotubes: An Overview of CVD Growth Methodologies

Terranova

Sessa

Rossi

2006

Chemical Vapor Deposition

118

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Carbon nanotubes are a new form of completely artificial crystalline carbon, which have never been found as a natural form. These fascinating hollow cylinders can be considered as prototypes of one-dimensional quantum wires, exhibit peculiar chemical-physical properties very different from those of other C-based nanostructures, and are envisaged to have potential in a wide range of applications. This review examines some of the most interesting CVD methodologies employed for the synthesis of carbon nanotubes. The results obtained from different methodologies demonstrate that carbon nanotubes can be grown by CVD under a wide range of experimental conditions, permitting flexible, tunable synthesis. Overall, in the last few years, CVD approaches have emerged as the most promising among those proposed for synthesizing carbon nanotubes.

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“…However, the most important purpose of using plasma is the outcome of uniform alignment of CNTs due to their interaction with the electric field [71]. There are many methods used to generate plasma, including radio-frequency (RF) plasma [72,73], microwave plasma [74][75][76], and direct-current (DC) plasma [77][78][79]. Regardless of the plasma source used, the key aspect is the generation of electric fields on the wafer surface in the plasma sheath.…”

Section: Pecvd System and Cnt Synthesis Processmentioning

confidence: 99%

Fabrication, Field Emission Properties and Theoretical Simulation of Triode-Type Carbon Nanotube Emitter Arrays

Wu¹

2000

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Carbon nanotubes exhibit excellent field emission properties and will likely be prime candidates as electron sources in future vacuum electronic applications. Recent research has focused on enhancing field emission from traditional diode-type emitters by adding a gate electrode between the anode and the cathode. Since the gate to cathode (emitter) distance in this triode-type structure is small relative to the anode to cathode distance, this structure allows relatively small gate voltages to significantly enhance or dampen field emission. The key challenge for this research is: synthesizing vertically aligned carbon nanotube field emitters inside arrays of triodetype devices. The most common "top-down", etch-deposit-synthesis method of synthesizing carbon nanotubes inside gated cavities is discussed here, and a novel "bottom-up" method is presented. This new approach bypasses the lithography and wet chemistry essential to the etch-deposit-synthesis method, instead using a dual-beam focused ion beam (FIB) system to mill cavities into a multi-layered substrate. Here the substrate is designed such that the act of milling a hole simultaneously creates the gate structure and exposes the catalyst from which carbon nanotubes can then be grown. Carbon nanotubes are synthesized using plasma enhanced chemical vapor deposition (PECVD) rather than thermal chemical vapor deposition, due to the superior alignment of the PECVD growth. As dual-beam FIB and PECVD can both be largely computerized, this synthesis method is highly reproducible. The dual-beam FIB also permits a high degree of controllability in gate radius, cavity depth and emitter I feel lucky to work with Prof. Jun Jiao's research group. I would like to thank

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Experimental study of fullerene-family formation using radio-frequency-discharge reactive plasmas

Cited by 25 publications

References 15 publications

Sub-micron size carbon structures synthesized using plasma enhanced CVD, without external heating and no catalyzer action

Sub-micron size carbon structures synthesized using plasma enhanced CVD, without external heating and no catalyzer action

The World of Carbon Nanotubes: An Overview of CVD Growth Methodologies

Fabrication, Field Emission Properties and Theoretical Simulation of Triode-Type Carbon Nanotube Emitter Arrays

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