1992
DOI: 10.1109/84.128052
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Experimental study of electric suspension for microbearings

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Cited by 48 publications
(13 citation statements)
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“…Fully rotational microdevices are limited in their performance by surface forces, such as friction, while solid-solid interfaces in rotating parts often suffer from wear, further decreasing performance. To minimize the effect of friction in rotary devices, contact needs to be limited by either micro-ball bearings [11], hydro-dynamic bearings [12], air bearings created through magnetic or electrostatic suspension [13,14], or a liquid film [15,16]. While most of these strategies require complex manufacturing processes with tight tolerances, the bearings used in this work were printed monolithically, requiring only a single fabrication step.…”
Section: Characterization Of 3d Printed Rotational Bearingsmentioning
confidence: 99%
“…Fully rotational microdevices are limited in their performance by surface forces, such as friction, while solid-solid interfaces in rotating parts often suffer from wear, further decreasing performance. To minimize the effect of friction in rotary devices, contact needs to be limited by either micro-ball bearings [11], hydro-dynamic bearings [12], air bearings created through magnetic or electrostatic suspension [13,14], or a liquid film [15,16]. While most of these strategies require complex manufacturing processes with tight tolerances, the bearings used in this work were printed monolithically, requiring only a single fabrication step.…”
Section: Characterization Of 3d Printed Rotational Bearingsmentioning
confidence: 99%
“…The authors analyzed two designs having a single and dual stator (see Figure 2a,b) and considered their potential application in micro-motors and bearings. Then, in 1992, the single-stator design for an application as micro-bearing was successfully experimentally studied by levitating a micro-plate having a thickness of 180 µm [21]. The actuator was able to generate a force up to 0.2 µN along the vertical axis.…”
Section: Electric Levitation Micro-actuatorsmentioning
confidence: 99%
“…This technique, which has been employed in a vacuum gyro [5] and microbearings [6], can also be used to levitate silicon wafers [7], hard disk media [8] and even dielectric materials such as glass [9]. However, there is no previous study that has really discussed using an electrostatic levitator for pick and place behavior in which the levitator is moved to the object.…”
Section: Introductionmentioning
confidence: 99%