Experimental comparison of extreme-ultraviolet multilayers for solar physics

Windt, David L.; Donguy, Soizik; Seely, John F.; Kjornrattanawanich, Benjawan

doi:10.1364/ao.43.001835

Cited by 61 publications

(33 citation statements)

References 20 publications

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“…In addition to this, Mg/SiC possesses several other favorable properties: near-zero film stress, good spectral selectivity and thermal stability up to about 350° C [17,18]. This unique combination of properties is highly desirable for mirror multilayer coatings in solar physics instrumentation and is unmatched by any of the other multilayer material pairs operating in the > 25 nm wavelength region such as Mo/Si [19], SiC/Si [19], Sc/Si [20], B 4 C/Si [19], Al/SiC [21], other Mg-based multilayers such as Mg/Co [22], and rare-earth based multilayers [23][24][25][26]. Despite the superior optical performance of Mg/SiC multilayers in the EUV region when compared to other material pairs, their use as coatings in applications that require long-term stability, such as for example the EUV imaging telescopes aboard NASA's Solar Dynamics Observatory mission [14], has been hindered by Mg corrosion [15,27].…”

Section: Introductionmentioning

confidence: 99%

Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region

Fernández-Perea¹,

Soufli²,

Robinson³

et al. 2012

Opt. Express

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Abstract:We have developed new, Mg/SiC multilayer coatings with corrosion barriers which can be used to efficiently and simultaneously reflect extreme ultraviolet (EUV) radiation in single or multiple narrow bands centered at wavelengths in the spectral region from 25 to 80 nm. Corrosion mitigation was attempted through the use of Al-Mg or Al thin layers. Three different multilayer design concepts were developed and deposited by magnetron sputtering and the reflectance was measured at near-normal incidence in a broad spectral range. Standard Mg/SiC multilayers were also deposited and measured for comparison. They were shown to efficiently reflect radiation at a wavelength of 76.9 nm with a peak reflectance of 40.6% at near-normal incidence, the highest experimental reflectance reported at this wavelength for a narrowband coating. The demonstration of multilayer coatings with corrosion resistance and multiple-wavelength EUV performance is of great interest in the development of mirrors for space-borne solar physics telescopes and other applications requiring long-lasting coatings with narrowband response in multiple emission lines across the EUV range.

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Section: Introductionmentioning

confidence: 99%

Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region

Fernández-Perea¹,

Soufli²,

Robinson³

et al. 2012

Opt. Express

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“…The SiC/Mg structure could be another possible structure for multilayers working at 30.4nm [11]. As can be seen in figure 5 this kind of multilayer shows a better reflectivity than the standard Mo/Si and the Si/B 4 C structure.…”

Section: Sic/mgmentioning

confidence: 97%

Multilayer coatings for multiband spectral observations

Zuccon¹,

Garoli²,

Pelizzo³

et al. 2017

International Conference on Space Optics — ICSO 2006

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“…Until recently, most reflective EUV coatings for space and other applications at wavelengths longer than 12.4 nm (the Si L absorption edge) and up to approximately 40 nm were fabricated of multilayer structures containing silicon as a low absorbing material. 17 However, at wavelengths beyond the Al L edge (λ > 17.1 nm), aluminum provides for higher theoretical peak reflectance since it is less absorbing than silicon. The question about aluminum was a technological feasibility of high-reflecting and stable multilayers containing this material, which is known for its chemical reactivity with oxygen and other materials as well as for high roughness of films obtained during the growth as a result of crystallization.…”

Section: Tri-component Al-based Multilayers For Euvmentioning

confidence: 99%

Single and multi-channel Al-based multilayer systems for space applications in EUV range

et al. 2013

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We report on further development of reflective multilayer coatings containing aluminum as low absorbing material for the extreme ultra-violet (EUV) applications, in particular for solar physics. Optimizations of the multilayer design and deposition process have allowed us to produce Al-based multilayers having relatively low interface roughness and record EUV reflectances in the range from 17 to 40 nm. The peak reflectance values of 56 % at 17.5 nm, 50 % at around 21 nm, and 42 % at 32 nm were achieved with new three-material multilayers Al/Mo/SiC and Al/Mo/B 4 C at near-normal incidence. We observe a good temporal stability of optical parameters of the multilayers over the period of 4 years. Moreover, the multilayer structure remains stable upon annealing at 100 °C in air during several weeks.We will discuss the optical properties of more complex Al-based systems with regard to the design of multilayer coatings that reflect more than one wavelength and reject some others within the spectral range from 17 to 40 nm. Such multichannel systems with enhanced reflectance and selectivity would provide a further advance in optical performance and compactness of EUV solar imaging instruments. We will discuss general aspects of design, optimization and fabrication of single-and multi-channel multilayer mirrors made with the use of aluminum. We will present recent results on the EUV reflectivity of multilayer coatings based on the Al/Mo/SiC and Al/Mo/B 4 C material combinations. Al-based multilayer systems are proposed as optical coatings in EUV telescopes of future space missions and in other EUV applications.

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Experimental comparison of extreme-ultraviolet multilayers for solar physics

Cited by 61 publications

References 20 publications

Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region

Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region

Multilayer coatings for multiband spectral observations

Single and multi-channel Al-based multilayer systems for space applications in EUV range

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