2009 IEEE International Electron Devices Meeting (IEDM) 2009
DOI: 10.1109/iedm.2009.5424362
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Experimental assessment of self-heating in SOI FinFETs

Abstract: In this paper, it is shown that self-heating causes a gigantic effect on the capacitances of MOSFETs/FinFETs. The effect is used to determine the SOI FinFET thermal impedance and to determine the temperature rise during FinFET operation. IntroductionFinFETs are regarded as prospective replacements for bulk-CMOS devices beyond the 22-nm node. Due to the poor thermal conductivity of some of the materials used in FinFET fabrication, and due to the confined nature of the FinFET geometry, self-heating is expected t… Show more

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Cited by 76 publications
(37 citation statements)
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“…The same holds for bulk resistance because of the well-designed RF layout of the measured test structures. The shortest devices are subject to some moderate self-heating [32], but the associated temperature increase can account for at most ∼10% of the observed excess noise and was therefore neglected in the analysis.…”
Section: Experimental Results and Model Validationmentioning
confidence: 99%
“…The same holds for bulk resistance because of the well-designed RF layout of the measured test structures. The shortest devices are subject to some moderate self-heating [32], but the associated temperature increase can account for at most ∼10% of the observed excess noise and was therefore neglected in the analysis.…”
Section: Experimental Results and Model Validationmentioning
confidence: 99%
“…This method has been proven to be a highly accurate and detailed characterization method for the SHE [8], [21], [22]. It is based on the fact that the ac output conductance shows a different behavior when the frequency is changed.…”
Section: Resultsmentioning
confidence: 99%
“…Although the GAA NWFET has been investigated in the stationary state a similar impact of self-heating and anharmonic phonon decay is expected in the transient regime of the transistor: 22 the time constants of the scattering processes are in effect orders of magnitude smaller than the usual clock frequency of integrated circuits (2-3 GHz). 6 The electron scattering rate due to phonon emission and absorption can be calculated as 1 s el ðEÞ $ 1 h R > ðEÞ À R < ðEÞ À Á and shows values around 10 to 100 THz.…”
mentioning
confidence: 97%