Experimental and numerical study of the chemical composition of WSe  thin films obtained by pulsed laser deposition in vacuum and in a buffer gas atmosphere

Grigoriev, S. N.; Fominski, V. Yu.; Gnedovets, A. G.; Романов, Р. И.

doi:10.1016/j.apsusc.2012.03.153

Cited by 58 publications

(24 citation statements)

References 22 publications

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“…The preferen tial sputtering of chalcogen atoms by the deposited atomic flux is observed the coatings are formed of the substoichiometric composition (x < 2). The buffer gas, in particular, the argon pumped into the deposition chamber enables to raise the chalcogen concentration in the DTM coating by reducing the energy of the deposited flux [10]. The tentative study [11] that it may improve the antifriction properties of coat ings by reducing the coefficient of friction.…”

Section: Introductionmentioning

confidence: 96%

Structural modification and tribological behavior improvement of solid lubricating WSe x coatings during pulsed laser deposition in buffer He-Gas

et al. 2013

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Thin film, solid lubricating WSe x coatings were deposited at room temperature on a steel substrate with a titanium underlayer by pulsed laser deposition (PLD). Two modes of PLD were investigated, i.e., the PLD under vacuum conditions and the PLD in a buffer gas (helium) at a pressure of 2-10 Pa. Gas was used to slow down the laser induced atomic flux and to modify thus the conditions of the coatings growth. At a pressure ~8 Pa, gas reduced the effectiveness of Se preferential sputtering by atomic flux, which resulted in the formation of coatings with a stoichiometric composition (x ≈ 2). The structure of the coatings was char acterized by a greater degree of the perfect organization of atoms in the nanophase laminar packaging and reduced internal stresses. Studies by the ball on disk tests in humid air showed that the modification of the structure and the chemical composition of the coatings had a significant effect on their tribological behavior. Vacuum deposited coatings fractured relatively quickly due to the cracking and delamination from the sub strate surface along the sliding track. When the coatings deposited in helium were tested, wear by layer by layer removal was dominant, so the adhesive fracture was only observed in the local parts of the track. The simulation of the laser vapor deposition in the vacuum and in the buffer gas was performed. Likely factors that improve the tribological properties of the coating during deposition in the buffer gas were disclosed.

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Section: Introductionmentioning

confidence: 96%

Structural modification and tribological behavior improvement of solid lubricating WSe x coatings during pulsed laser deposition in buffer He-Gas

et al. 2013

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“…Soft selenization10, physical vapor transport11, electrodeposition12, pulsed laser deposition13, selenium–oxygen ion exchange14, and atmospheric pressure chemical vapor deposition15 have been reported to fabricate WSe 2 film. Among these synthetic methods, an environmentally friendly method by soft selenization of the W film has gained superiority and may be ready for potential development.…”

mentioning

confidence: 99%

Effect of magnetron sputtering parameters and stress state of W film precursors on WSe2 layer texture by rapid selenization

Gao

Xie

et al. 2016

Sci Rep

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Tungsten diselenide (WSe2) film was obtained by rapid selenization of magnetron sputtered tungsten (W) film. To prevent WSe2 film peeling off from the substrate during selenization, the W film was designed with a double-layer structure. The first layer was deposited at a high sputtering-gas pressure to form a loose structure, which can act as a buffer layer to release stresses caused by WSe2 growth. The second layer was deposited naturally on the first layer to react with selenium vapour in the next step. The effect of the W film deposition parameters(such as sputtering time, sputtering-gas pressure and substrate bias voltage)on the texture and surface morphology of the WSe2 film was studied. Shortening the sputtering time, increasing the sputtering-gas pressure or decreasing the substrate bias voltage can help synthesize WSe2 films with more platelets embedded vertically in the matrix. The stress state of the W film influences the WSe2 film texture. Based on the stress state of the W film, a model for growth of the WSe2 films with different textures was proposed. The insertion direction of the van der Waals gap is a key factor for the anisotropic formation of WSe2 film.

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“…According to results of energy characteristics of the ion flow, the maximum energy of ions in vacuum could attain 500 eV. In the neutral component of laser plasma, there are also particles with fairly high energy [11]. Such a bombardment resulted in effective preferential sputtering of selenium (x < 2), and the displacement/atom ratio was signifi cantly greater than unity.…”

Section: Pld In a Standard Configurationmentioning

confidence: 96%

Control of structure of WSe x /C nanocoatings synthesized via pulsed laser deposition

Grigoriev

Fominski

Nevolin

et al. 2015

Inorg. Mater. Appl. Res.

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The requirements are formulated for a new type of nanomaterials based on transition metal dichalcogenides (TMD), which are promising to create relatively cheap and effective catalysts for electro chemical hydrogen evolution reaction. The possibility of implementation of some important requirements for the structure of these materials is investigated by the example of thin film coatings containing tungsten dise lenide and carbon. WSe x /C coatings are prepared via pulsed laser deposition in an inert and reactive (CH 4 ) gas in a standard configuration and using an antidroplet screen. In some cases, low DC voltage or pulsed high voltage bias are applied to the substrate, initiating ion bombardment of the coatings. Factors exerting an important influence on the chemical composition, morphology, and surface topography of the coatings are established. Modes of formation of a rough coating surface with a high density of WSe 2 edges are determined, which is essential for high catalytic activity and performance of TMD containing nanocatalysts. The carbon phase with a high concentration of sp 2 bonds is needed for effective current transport in the formed layers.

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Experimental and numerical study of the chemical composition of WSe thin films obtained by pulsed laser deposition in vacuum and in a buffer gas atmosphere

Cited by 58 publications

References 22 publications

Structural modification and tribological behavior improvement of solid lubricating WSe x coatings during pulsed laser deposition in buffer He-Gas

Structural modification and tribological behavior improvement of solid lubricating WSe x coatings during pulsed laser deposition in buffer He-Gas

Effect of magnetron sputtering parameters and stress state of W film precursors on WSe2 layer texture by rapid selenization

Control of structure of WSe x /C nanocoatings synthesized via pulsed laser deposition

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