Excitation Kinetics of Oxygen O(1D) State in Low-Pressure Oxygen Plasma and the Effect of Electron Energy Distribution Function

Abstract

Abstract:We develop numerical model to discuss the number density and excitation kinetics of O( 1 D) state in lowpressure discharge oxygen plasma. The governing equations are the Boltzmann equation to describe the electron energy distribution function and the rate equations of the relevant excited states. We have calculated them back and forth until self-consistent solution is obtained. When the rate coefficient of the electron impact dissociation of O 2 to O( 3 P) and O( 1 D) atoms is assumed to be functions of electron temperature T e with Maxwellian electron energy distribution, the obtained results are found to be inappropriate. When the rate coefficients are written as functions of electron energy distribution function, satisfactory results are obtained as number density distribution of excited states. We also experimentally examined and confirmed the validity of the model by actinometry measurement for number density of the O( 3 P) state. It is found that we should consider the electron energy distribution function in describing the excitation kinetics of O( 1 D) state in low-pressure oxygen plasma.

Nonequilibrium characteristics in the rotational temperature of CO excited states in microwave discharge CO2 plasma

“…It is identical to the one applied in the previous experiments. [34][35][36][37][38][39][40][41][42][43][44][45][46] The magnetron generates a microwave with a frequency of 2.45 GHz, as a general-purpose variable output microwave oscillator with its output of 0.2-4.9 kW equipped with a built-in isolator. It was connected to the discharge tube via a set of waveguides with a power monitor and a 3-stub tuner, which was finally terminated with a movable short-circuited plunger.…”