2003
DOI: 10.1143/jjap.42.l1312
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Excitation Frequency Effects on Stabilized Efficiency of Large-Area Amorphous Silicon Solar Cells Using Flexible Plastic Film Substrate

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Cited by 12 publications
(4 citation statements)
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“…Among metallic materials, stainless steel and molybdenum foils have been utilized as substrates in the fabrication of thin-film transistors (Theiss and Wagner, 1996;Wu et al, 1997;Howell et al, 2000;Wu et al, 2002;Park et al, 2003) and solar cells (Yang et al, 2003). A number of plastic materials (organic polymers) also have been tested successfully in a variety of thin-film applications (Constant et al, 1994;Young et al, 1997;Burns et al, 1997;Burrows et al, 1997;Gleskova et al, 1998;Parsons et al, 1998;Lueder et al, 1998;Thomasson et al, 1998;Sandoe, 1998;Carey et al, 2000;Sazonov et al, 2000;Boucinha et al, 2000;Kane et al, 2001;Ichikawa et al, 2001;Hsu et al, 2002a;Brida et al, 2002;Takano et al, 2003;Cheng et al, 2004;Gelinck et al, 2004;Shahrjerdi et al, 2004;Nomura et al, 2004;Monacelli et al, 2004;Choi et al, 2004).…”
Section: Introductionmentioning
confidence: 99%
“…Among metallic materials, stainless steel and molybdenum foils have been utilized as substrates in the fabrication of thin-film transistors (Theiss and Wagner, 1996;Wu et al, 1997;Howell et al, 2000;Wu et al, 2002;Park et al, 2003) and solar cells (Yang et al, 2003). A number of plastic materials (organic polymers) also have been tested successfully in a variety of thin-film applications (Constant et al, 1994;Young et al, 1997;Burns et al, 1997;Burrows et al, 1997;Gleskova et al, 1998;Parsons et al, 1998;Lueder et al, 1998;Thomasson et al, 1998;Sandoe, 1998;Carey et al, 2000;Sazonov et al, 2000;Boucinha et al, 2000;Kane et al, 2001;Ichikawa et al, 2001;Hsu et al, 2002a;Brida et al, 2002;Takano et al, 2003;Cheng et al, 2004;Gelinck et al, 2004;Shahrjerdi et al, 2004;Nomura et al, 2004;Monacelli et al, 2004;Choi et al, 2004).…”
Section: Introductionmentioning
confidence: 99%
“…[5][6][7][8][9][10] We controlled not only excitation frequency but also reaction pressure and plasma electrode geometries to have highquality amorphous silicon and related thin films at high deposition rates. [11][12][13][14] Eventually, we achieved fivefold faster production using the same apparatus without deteriorating solar cell performance.…”
Section: Introduction 11 Flexible Solar Cellmentioning
confidence: 99%
“…For the optimization of solar cells based on hydrogenated amorphous silicon (a-Si:H), there is a strong need to characterize the light-induced degradation in a-Si:H layers [1][2]. So far, the light-induced degradation in the a-Si:H has been reported to show a good correlation with the SiH 2 bond density in the a-Si:H network and the light-induced defect formation is enhanced in the a-Si:H layers with higher SiH 2 densities [3][4][5].…”
Section: Introductionmentioning
confidence: 99%