Exchangeable Miniaturized Mass Spectrometer Chip Based on Silicon Structures

Abstract

This paper reports a design of an exchangeable miniaturized mass spectrometry chip using spring-loaded pins and O-rings for electrical and fluidic connections. This planar microelectromechanical system (MEMS)-chip works with 300 µm high silicon structures between two borosilicate glasses and has a size of 13 mm × 7 mm. Because of its small size a small vacuum pump is sufficient, and it is suitable for mobile measurements and portable applications. Because of exchangeability of MEMS-chips with fluidic and electrical high voltage connections a direct comparison between chips is possible.

Waste to Carbon: Influence of Structural Modification on VOC Emission Kinetics from Stored Carbonized Refuse-Derived Fuel

“…Nearly online (real-time) analyses could facilitated by MS systems [49], also equipped with a headspace module and separation capability. Miniaturization of single modules fabricated using microsystem technology, and even the first chip-scale mass spectrometers [50][51][52] is currently feasible. This could be the direction of detection method development, but it should be emphasized that the aforementioned systems are not yet commercially available.…”