Evolution of enhanced crystallinity and mechanical property of nanocomposite Ti–Si–N thin films using magnetron reactive co-sputtering

Chung, Chen-Kuei; Chang, Hao; Chang, Shou-Yi; Liao, Mei-Hsiu

doi:10.1016/j.jallcom.2012.05.018

Cited by 28 publications

(7 citation statements)

References 16 publications

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“…Further, combined FEM with nanoindentation approach predicts the values of yield stress of the as-deposited VO-MO film as 210 MPa which is also improved to 412 MPa. The increase in crystallinity due to annealing7273 is believed to be the reason behind the improvement of mechanical properties of the present VO-MO films.…”

Section: Resultsmentioning

confidence: 86%

Nanocolumnar Crystalline Vanadium Oxide-Molybdenum Oxide Antireflective Smart Thin Films with Superior Nanomechanical Properties

Dey

Nayak

Akinlabi

et al. 2016

Sci Rep

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Vanadium oxide-molybdenum oxide (VO-MO) thin (21-475 nm) films were grown on quartz and silicon substrates by pulsed RF magnetron sputtering technique by altering the RF power from 100 to 600 W. Crystalline VO-MO thin films showed the mixed phases of vanadium oxides e.g., V 2 O 5 , V 2 O 3 and VO 2 along with MoO 3 . Reversible or smart transition was found to occur just above the room temperature i.e., at ~45-50 °C. The VO-MO films deposited on quartz showed a gradual decrease in transmittance with increase in film thickness. But, the VO-MO films on silicon exhibited reflectance that was significantly lower than that of the substrate. Further, the effect of low temperature (i.e., 100 °C) vacuum (10 −5 mbar) annealing on optical properties e.g., solar absorptance, transmittance and reflectance as well as the optical constants e.g., optical band gap, refractive index and extinction coefficient were studied. Sheet resistance, oxidation state and nanomechanical properties e.g., nanohardness and elastic modulus of the VO-MO thin films were also investigated in as-deposited condition as well as after the vacuum annealing treatment. Finally, the combination of the nanoindentation technique and the finite element modeling (FEM) was employed to investigate yield stress and von Mises stress distribution of the VO-MO thin films.Vanadium oxides based films and coatings are extensively studied due to both thermochromic 14,15,[17][18][19][20]24,25,31 . The Mo and/or molybdenum oxide doped vanadium oxides are reported to be grown by a multitude of techniques such as magnetron sputtering technique 15 , atmospheric pressure chemical vapour deposition 26 , cathodic

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Section: Resultsmentioning

confidence: 86%

Nanocolumnar Crystalline Vanadium Oxide-Molybdenum Oxide Antireflective Smart Thin Films with Superior Nanomechanical Properties

Dey

Nayak

Akinlabi

et al. 2016

Sci Rep

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“…In particular, significant amount of efforts have been devoted to decreasing the temperature at which hard coatings are formed and improving the properties of these coatings to increase their hardness and oxidation resistance. Ternary Ti-Al-N [2,3] and Ti-Si-N [4,5] systems with higher hardness values and oxidation resistances than their TiN binary counterparts have been developed.…”

Section: Introductionmentioning

confidence: 99%

“…Ternary Ti-Al-N [2,3] and Ti-Si-N [4,5] systems with higher hardness and oxidation resistance values than those of their TiN binary counterparts have been developed.…”

Section: Introductionmentioning

confidence: 99%

Oxidation resistance and characterization of (AlCrMoTaTi)-Six-N coating deposited via magnetron sputtering

Tsai

Deng

Chang

et al. 2015

Journal of Alloys and Compounds

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“…The compositions of Ta-Si-N thin films have been investigated extensively in the past twenty years [28][29][30][31][32][33][34]. Chung et al [28,[30][31][32]34] found that the microstructure and the possible compounds in Ta-Si-N thin films were sensitive to the process parameters. Different phases, such as, Ta 2 Si, Ta 5 Si 3 , Ta 2 N, TaN and/or Ta 1-x Si x N rather than a particular compound are usually formed.…”

Section: Resultsmentioning

confidence: 99%

Fabrication of Ta–Si–N/Ag nanocomposite thin films with near-zero temperature coefficient of resistance

Gao

et al. 2015

Journal of Alloys and Compounds

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Evolution of enhanced crystallinity and mechanical property of nanocomposite Ti–Si–N thin films using magnetron reactive co-sputtering

Cited by 28 publications

References 16 publications

Nanocolumnar Crystalline Vanadium Oxide-Molybdenum Oxide Antireflective Smart Thin Films with Superior Nanomechanical Properties

Nanocolumnar Crystalline Vanadium Oxide-Molybdenum Oxide Antireflective Smart Thin Films with Superior Nanomechanical Properties

Oxidation resistance and characterization of (AlCrMoTaTi)-Six-N coating deposited via magnetron sputtering

Fabrication of Ta–Si–N/Ag nanocomposite thin films with near-zero temperature coefficient of resistance

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