2015
DOI: 10.1016/j.jallcom.2015.06.025
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Oxidation resistance and characterization of (AlCrMoTaTi)-Six-N coating deposited via magnetron sputtering

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Cited by 61 publications
(18 citation statements)
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“…Another important technique for the HEA coatings is magnetron sputtering where the HEA is atomically sputtered layer-by-layer over a substrate. Most of the HEA coatings deposited by sputtering are HEA nitride, carbide, and boride coatings with excellent wear, oxidation, and irradiation resistance properties [81][82][83][84][85]. Most of these sputtered coatings have BCC or FCC solid solution phases with amorphous structures compared to other thermally sprayed coatings.…”
Section: Methods Of Fabrication Of Hea Coatingsmentioning
confidence: 99%
“…Another important technique for the HEA coatings is magnetron sputtering where the HEA is atomically sputtered layer-by-layer over a substrate. Most of the HEA coatings deposited by sputtering are HEA nitride, carbide, and boride coatings with excellent wear, oxidation, and irradiation resistance properties [81][82][83][84][85]. Most of these sputtered coatings have BCC or FCC solid solution phases with amorphous structures compared to other thermally sprayed coatings.…”
Section: Methods Of Fabrication Of Hea Coatingsmentioning
confidence: 99%
“…The superior oxidation resistance was owing to the protection of the dense Al 2 O 3 layer and inner Si-rich amorphous network. Tsai et al [135] prepared the (AlCrMoTaTi)-Si x -N coatings through a reactive magnetron sputtering system and found that the addition of Si into (AlCrMoTaTi)N coatings significantly improved the oxidation resistance. A Si content of 7.51 at.% could decrease the oxide layer thickness from 1590 nm to approximately 202 nm after oxidation at 900°C for 2 h. The good anti-oxidation performance could be attributed to the protective a-Al 2 O 3 surface layer and a-SiO 2 phase that existed in the inner oxide layer.…”
Section: Temperature and Oxidation Resistancementioning
confidence: 99%
“…High‐entropy alloy nitrides (HEANs), a kind of high‐entropy ceramic material, have shown outstanding properties similar to HEAs, including high hardness, corrosion resistance, thermal stability, radiation resistance, and anti‐diffusion. [ 19–23 ] In principle, to design an HEAN coating, the selected elements should possess high affinity for nitrogen, such as V, Hf, Zr, Ti, and Nb. [ 24 ] In addition to the element composition, the deposition parameters of magnetron sputtering, such as the ratio of N 2 /Ar, the bias voltage, and the sputtering time, have a significant effect on the microstructure of HEANs, which endows the material with certain features, including mechanical and physical properties.…”
Section: Introductionmentioning
confidence: 99%