2013
DOI: 10.1016/j.jlumin.2012.12.043
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Evidence of strong acceptor peaks in ZnO thin films doped with phosphorus by plasma immersion ion implantation technique

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Cited by 18 publications
(3 citation statements)
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“…The formation of secondary electrons limits its efficiency, and in situ monitoring of the dose in PIII becomes difficult [7]. The details are given elsewhere [8]. An n‐type ZnO layer was deposited using pulsed‐lased deposition at 650°C with an oxygen pressure of 5 × 10 −2 mbar.…”
Section: Methodsmentioning
confidence: 99%
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“…The formation of secondary electrons limits its efficiency, and in situ monitoring of the dose in PIII becomes difficult [7]. The details are given elsewhere [8]. An n‐type ZnO layer was deposited using pulsed‐lased deposition at 650°C with an oxygen pressure of 5 × 10 −2 mbar.…”
Section: Methodsmentioning
confidence: 99%
“…1 shows the crosssectional and top views of the fabricated device. Results and discussion: A detailed description of the fabrication of p-type ZnO using phosphorus doping has been described elsewhere [8]. As mentioned earlier, stability is a major issue for p-type ZnO, because of the low solubility of dopants and the self-compensating nature of ZnO.…”
mentioning
confidence: 99%
“…We have previously reported on p-type ZnO films implanted with phosphorus by plasma immersion ion implantation (PIII). 18,19 The same approach has extended to ZnMgO thin films in an attempt to achieve reliable and reproducible p-type films. Although a dominating acceptor peak was not detected, the implantation of phosphorus ions into Zn 1Àx Mg x O by PIII shows promise.…”
mentioning
confidence: 99%