Evaluation of Titanium Vacuum Chamber as Getter Pump

Kamiya, J.; Takano, Kazuhiro; Yuza, Hiromu; Wada, Kenta

doi:10.1380/ejssnt.2022-017

Cited by 1 publication

(2 citation statements)

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Furthermore, the mechanism of the outgassing reduction by the vacuum firing should be studied from a surface microscopic point of view. Our previous research focused on the titanium chamber [15]. The build-up result after baking showed that the vacuum-fired titanium chamber has lower outgassing for typical gas species, such as H 2 , H 2 O, CO, and CO 2 than the non-vacuum-fired one.…”

Section: Introductionmentioning

confidence: 99%

“…Surface condition difference between vacuumfired and non-vacuum-fired stainless steel was also observed. the build-up test, which is the same as the previous research for the titanium chamber [15]. A vacuum chamber for the test was attached to the vacuum chamber for pumping, which was evacuated by a TMP (TG900M, Osaka Vacuum) with a DSP (ISP250-C, ANEST IWATA) as the fore-pump, through a metal angle valve (MV) (57.0 XHV All-Metal Angle Valve, VAT).…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Evaluation of Vacuum Firing Effect on Stainless Steel from Vacuum and Surface Point of View

Kamiya

Takano

Wada

et al. 2022

e-J. Surf. Sci. Nanotechnol.

Self Cite

View full text Add to dashboard Cite

Vacuum firing, which is a heat treatment at high temperature in a high vacuum furnace, is known as the method for the outgassing reduction of the vacuum materials, such as stainless steel, titanium, etc. The outgassing rate of the vacuum-fired stainless steel is known to be low after ordinal baking at 150−200°C, which is typically in the order of 10 −11 −10 −10 Pa m 3 s −1 . In this research, the effect of the vacuum firing (850°C for 10 h) on the stainless steel SUS304 is investigated from the vacuum and surface point of view. The build-up test of the stainless steel vacuum chamber clearly showed the outgassing suppression by the vacuum firing. Especially, the hydrogen outgassing, which was the main component after baking, was much reduced. Thermal desorption spectroscopy showed that the vacuum firing reduced the desorption of H 2 , H 2 O, CO, and CO 2 with high desorption energy even after air exposure. Especially, the effect on H 2 was very large. X-ray photoelectron spectroscopy (XPS) showed the increase of ferric oxide and the decrease of chrome oxide on the near surface of the vacuum-fired stainless steel. On the other hand, XPS also showed that the chrome oxide was systematically increased by heating from 200 to 400°C. These results support the outgassing reduction mechanism by the vacuum firing that the hydrogen is reduced from the bulk due to the diffusion to the vacuum phase during the vacuum firing and the surface metal oxides are reformed as a diffusion barrier from the gas phase to the bulk. KeywordsVacuum firing; Outgassing; Build-up method; Thermal desorption spectroscopy; X-ray photoelectron spectroscopy 42 which is the high-temperature heating of vacuum chambers 43 or vacuum materials in a high vacuum furnace, has been 44 known as the process of reducing the amount of dissolved 45 hydrogen in the bulk to obtain low outgassing [3]. For ex-46 ample, the CERN applied vacuum firing to stainless steel at 47

show abstract

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%