Abstract:Vacuum firing, which is a heat treatment at high temperature in a high vacuum furnace, is known as the method for the outgassing reduction of the vacuum materials, such as stainless steel, titanium, etc. The outgassing rate of the vacuum-fired stainless steel is known to be low after ordinal baking at 150−200°C, which is typically in the order of 10 −11 −10 −10 Pa m 3 s −1 . In this research, the effect of the vacuum firing (850°C for 10 h) on the stainless steel SUS304 is investigated from the vacuum and surf… Show more
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