2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) 2023
DOI: 10.1109/mems49605.2023.10052493
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Evaluation of Thermoelectric Properties of Monolithically-Integrated Core-Shell Si Nanowire Bridges

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Cited by 2 publications
(3 citation statements)
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“…We further compared the TE performance, including thermal conductivity, electrical conductivity, Seebeck coefficient, and ZT, of our double-sided SiNWs with others reported in the literature, and the results are summarized in Table I. Our double-sided SiNW structure exhibits a thermal conductivity of 0.644 W/mK at 700 K, which is significantly lower than that of single-sided vertical SiNWs (10.1 W/mK at 300 K) of Lee et al 22 The electrical conductivity of our double-sided SiNWs is 4288 S/m at 700 K, which is substantially higher than the resistivity reported in the study of Uesugi et al 31 for the core-shell SiNWs. The Seebeck coefficient of our SiNWs is 225 μV/K at 700 K, which is within the range of values reported in the literature but lower than the À284 μV/K for the SiNW/SOG composite from Curtin et al 32 Our study is the only one that reports a ZT value at 700 K.…”
Section: Characterizations Of Sinw Array Device Thermoelectric Perfor...mentioning
confidence: 46%
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“…We further compared the TE performance, including thermal conductivity, electrical conductivity, Seebeck coefficient, and ZT, of our double-sided SiNWs with others reported in the literature, and the results are summarized in Table I. Our double-sided SiNW structure exhibits a thermal conductivity of 0.644 W/mK at 700 K, which is significantly lower than that of single-sided vertical SiNWs (10.1 W/mK at 300 K) of Lee et al 22 The electrical conductivity of our double-sided SiNWs is 4288 S/m at 700 K, which is substantially higher than the resistivity reported in the study of Uesugi et al 31 for the core-shell SiNWs. The Seebeck coefficient of our SiNWs is 225 μV/K at 700 K, which is within the range of values reported in the literature but lower than the À284 μV/K for the SiNW/SOG composite from Curtin et al 32 Our study is the only one that reports a ZT value at 700 K.…”
Section: Characterizations Of Sinw Array Device Thermoelectric Perfor...mentioning
confidence: 46%
“…Those studies need to determine the power output under various controlled temperature gradients to calculate the efficiency of energy conversion from heat to electricity. Power density needs to be evaluated to understand the potential of applying these devices under the constraints of space and weight 22 Single-sided vertical Si NWs 10.1 (300 K) Not specified 298 (300 K) Not specified Uesugi et al 31 Single-sided core-shell SiNWs Not specified 0.000 013 610 Not specified Curtin et al 32 Single-sided SiNW/SOG composite 1.45 (300 K) Not specified −284 Not specified limitations. Primary challenges at the device level include managing the thermal and electrical contact resistances at the junctions and ensuring the stability of these joints under varying thermal conditions.…”
Section: Characterizations Of Sinw Array Device Thermoelectric Perfor...mentioning
confidence: 99%
“…Silicon-based nanowires (SiNWs) are particularly attractive because of silicon's focal role in the semiconductor industry. SiNW arrays have distinct physical and optical properties, allowing them to be used as basic components for a variety of applications, such as solar cells [3][4][5][6], thermoelectric systems [7][8][9], Li-ion batteries [10], field-effect transistors (FETs) [11][12][13], bio and chemical sensors [14,15], photodetectors [16][17][18] and photocatalysts [19,20]. SiNWs are distinct and sensitive to surface analyte adsorption because of their high surface area-to-volume ratio and repeatable electronic properties.…”
Section: Introductionmentioning
confidence: 99%