Evaluation of structure and mechanical properties of TiZrNi coatings under annealing

Penkov, Oleksiy V.; Kopylets, I. А.; Khadem, Mahdi; Кондратенко, В. В.; Malykhin, S.V.; Surovitskiy, S.V.; Fedchenko, Anna V.

doi:10.1016/j.tsf.2022.139149

Cited by 5 publications

(4 citation statements)

References 29 publications

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“…This example illustrates the evaluation of a single-layer TiZrNi coating deposited by DC magnetron sputtering onto a glass substrate, as described by Penkov et al (2022). The XRR was measured using a DRON-3M diffractometer (BOUR-EVESTNIK, JSC) with filtered Cu K� radiation.…”

Section: Single-layer Coatingmentioning

confidence: 99%

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X-Ray Calc 3: improved software for simulation and inverse problem solving for X-ray reflectivity

Penkov,

Li,

Mikki

et al. 2024

J Appl Crystallogr

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This work introduces X-Ray Calc (XRC), an open-source software package designed to simulate X-ray reflectivity (XRR) and address the inverse problem of reconstructing film structures on the basis of measured XRR curves. XRC features a user-friendly graphical interface that facilitates interactive simulation and reconstruction. The software employs a recursive approach based on the Fresnel equations to calculate XRR and incorporates specialized tools for modeling periodic multilayer structures. This article presents the latest version of the X-Ray Calc software (XRC3), with notable improvements. These enhancements encompass an automatic fitting capability for XRR curves utilizing a modified flight particle swarm optimization algorithm. A novel cost function was also developed specifically for fitting XRR curves of periodic structures. Furthermore, the overall user experience has been enhanced by developing a new single-window interface.

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Section: Single-layer Coatingmentioning

confidence: 99%

“…The first example illustrates the fitting of the XRR curve for Mo/Si PMMs deposited by DC magnetron sputtering onto a silicon substrate, as described by Penkov et al (2022) [Fig. 9(a)].…”

Section: Periodic X-ray Mirrorsmentioning

confidence: 99%

X-Ray Calc 3: improved software for simulation and inverse problem solving for X-ray reflectivity

Penkov,

Li,

Mikki

et al. 2024

J Appl Crystallogr

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“…As of now, TEM is the only available equipment for observing atomic structures at the nanoscale, which can be exploited to characterize variations in the nanostructure during heating through direct observation [27]. Also, the nanoindentation method can be used to assess thermal stability, since it is sensitive to structural-phase transformations occurring in coatings during heating [28,29].…”

Section: Introductionmentioning

confidence: 99%

Thermal Stability of Oxidation-Resistant Ta-Zr-Si-B-N and Ta-Zr-Si-B-C Coatings under In Situ TEM Heating and Vacuum Annealing

Sytchenko,

Loginov,

Levashov

et al. 2023

Applied Sciences

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Amorphous Ta-Zr-Si-B-C and Ta-Zr-Si-B-N coatings were deposited by magnetron sputtering using a ceramic target in Ar + C2H4 and Ar + N2 reaction media. Thermal stability under in situ TEM heating, vacuum annealing and nanoindentation, as well as the effect of heating on structural-phase transformations in coatings and their mechanical characteristics, have been studied. The results showed that the heating of amorphous Ta-Zr-Si-B-C and Ta-Zr-Si-B-N coatings in a TEM column leads to precipitation h-TaSi2 and c-TaC crystalline phases at a temperature of 600 °C and h-Ta5Si3 and c-TaN at a temperature of 1000 °C, respectively. Similar structural-phase transformations were revealed as a result of vacuum annealing. An increase in temperature from 20 to 1000 °C led to a decrease in the hardness of the carbon-containing coating from 21 to 16 GPa as a result of stress relaxation. For the Ta-Zr-Si-B-N coating at a temperature of 1000 °C, an increase in hardness was observed from 18 to 27 GPa, which is associated with the crystallization of the coating, with the formation of a nanocomposite structure with h-Ta5Si3 and c-TaN crystallites of 6–10 nm in size and an a-Si(Zr,B)N amorphous region.

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“…The temperature difference will inevitably cause contact thermal drifting during the penetration process, as well as inaccurate and unreliable P - h curves [ 14 ]. Meanwhile, the testing environment including oxygen-free [ 15 ] and steam-free [ 16 ] environment (usually implemented using vacuum chamber), is also considered in indentation to ensure that the specimen surface maintains its initial properties. However, most investigations deem test results are accurate, provided that the experiments can be conducted favorably, and the P - h curves seem “normal”.…”

Section: Introductionmentioning

confidence: 99%

Temperature-Induced Internal Stress Influence on Specimens in Indentation Tests

Wang

Zhao

2022

Micromachines

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The factors affecting the internal stress of specimens during indentation tests were investigated by finite element analysis (FEA) modelling. This was carried out to gain a qualitative understanding of the test errors introduced by the temperature environment during the indentation process. In this study, the influence of thermal expansion of fixed stage on upper specimen (currently neglected in temperature indentation) was explored in detail. Technical issues associated with the parameters of the specimen (such as thickness, width, and elastic modulus) and external conditions (such as stage and glue) were identified and addressed. The test error of the calculated hardness and elastic modulus of the specimen reached up to more than 3% simultaneously at −196 °C (temperature of liquid nitrogen). Based on these considerations, the preferred operation conditions were identified for testing in specific temperature environment. These results can guide experiments aimed at obtaining precise mechanical parameters.

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Evaluation of structure and mechanical properties of TiZrNi coatings under annealing

Cited by 5 publications

References 29 publications

X-Ray Calc 3: improved software for simulation and inverse problem solving for X-ray reflectivity

X-Ray Calc 3: improved software for simulation and inverse problem solving for X-ray reflectivity

Thermal Stability of Oxidation-Resistant Ta-Zr-Si-B-N and Ta-Zr-Si-B-C Coatings under In Situ TEM Heating and Vacuum Annealing

Temperature-Induced Internal Stress Influence on Specimens in Indentation Tests

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