Thermal Stability of Oxidation-Resistant Ta-Zr-Si-B-N and Ta-Zr-Si-B-C Coatings under In Situ TEM Heating and Vacuum Annealing
Alina D. Sytchenko,
Pavel A. Loginov,
Evgeny A. Levashov
et al.
Abstract:Amorphous Ta-Zr-Si-B-C and Ta-Zr-Si-B-N coatings were deposited by magnetron sputtering using a ceramic target in Ar + C2H4 and Ar + N2 reaction media. Thermal stability under in situ TEM heating, vacuum annealing and nanoindentation, as well as the effect of heating on structural-phase transformations in coatings and their mechanical characteristics, have been studied. The results showed that the heating of amorphous Ta-Zr-Si-B-C and Ta-Zr-Si-B-N coatings in a TEM column leads to precipitation h-TaSi2 and c-T… Show more
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