“…Hardness sensing especially for soft material is one of important problem in many fields such as foods industry and material science, including robotics [1][2][3][4][5][6][7][8][9][10][11].For application, the hardness sensing used many fields such as breast cancer diagnosis [6,12], tension-type headache from the musculoskeletal complaints [13,14], trapezius muscle hardness changes from the reason of visual display terminal height [15], muscle hardness measurements using ultrasound [16,17], hardness sensing using optical (IR frequency) techniques [18].As the force sensor, gauge sensor has been used for the hardness measurement. Since gauge sensor measures a distortion of metal, the accuracy of weak force range (0.1 to few N) inevitably drops, and it is considered difficult to measure the hardness of soft material [3,[19][20][21][22][23][24][25][26][27][28].…”